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Optimization a structure of MEMS based PDMS ferroelectret for human body energy harvesting and sensing

Optimization a structure of MEMS based PDMS ferroelectret for human body energy harvesting and sensing
Optimization a structure of MEMS based PDMS ferroelectret for human body energy harvesting and sensing
A ferroelectret is typically a charge-storing cellular foam that demonstrates excellent piezoelectric properties making them potentially suitable for both sensing and energy harvesting applications. In this work we developed a numerical finite element analysis (FEA) model to describe ferroelectret materials and to further improve their piezoelectric properties. Using this FEA model, ferroelectret materials with rectangular and parallelogram void structure were designed and then fabricated by casting polydimethysiloxane (PDMS) in microfabricated silicon moulds. The piezoelectric properties and energy harvesting output of the fabricated PDMS ferroelectrets were both simulated and evaluated experimentally. For a single layer PDMS parallelogram void structure, the predicted piezoelectric coefficient d 33 from the ANSYS simulations is around 320 pC N−1. The fabricated PDMS ferroelectret has a low Young's modulus of 670 kPa and a piezoelectric coefficient of 240 pC N−1. A maximum d 33 of 520 pC N−1 was observed in a multilayer ferroelectret structure. When applying compressive forces simulating a footstep, the material demonstrated an output power of 2.73 μW when connected to a 65 MΩ resistive load.
0964-1726
1-13
Shi, Junjie
3e2ba75e-a773-478a-aacc-5d926bfd1669
Luo, Zhenhua
eb242e50-a73e-474f-809f-4924cfed68c2
Zhu, Dibin
ec52eae1-39fa-427c-968b-e76089a464a6
Beeby, Stephen
ba565001-2812-4300-89f1-fe5a437ecb0d
Shi, Junjie
3e2ba75e-a773-478a-aacc-5d926bfd1669
Luo, Zhenhua
eb242e50-a73e-474f-809f-4924cfed68c2
Zhu, Dibin
ec52eae1-39fa-427c-968b-e76089a464a6
Beeby, Stephen
ba565001-2812-4300-89f1-fe5a437ecb0d

Shi, Junjie, Luo, Zhenhua, Zhu, Dibin and Beeby, Stephen (2019) Optimization a structure of MEMS based PDMS ferroelectret for human body energy harvesting and sensing. Smart Materials and Structures, 28 (7), 1-13. (doi:10.1088/1361-665X/ab1ce2).

Record type: Article

Abstract

A ferroelectret is typically a charge-storing cellular foam that demonstrates excellent piezoelectric properties making them potentially suitable for both sensing and energy harvesting applications. In this work we developed a numerical finite element analysis (FEA) model to describe ferroelectret materials and to further improve their piezoelectric properties. Using this FEA model, ferroelectret materials with rectangular and parallelogram void structure were designed and then fabricated by casting polydimethysiloxane (PDMS) in microfabricated silicon moulds. The piezoelectric properties and energy harvesting output of the fabricated PDMS ferroelectrets were both simulated and evaluated experimentally. For a single layer PDMS parallelogram void structure, the predicted piezoelectric coefficient d 33 from the ANSYS simulations is around 320 pC N−1. The fabricated PDMS ferroelectret has a low Young's modulus of 670 kPa and a piezoelectric coefficient of 240 pC N−1. A maximum d 33 of 520 pC N−1 was observed in a multilayer ferroelectret structure. When applying compressive forces simulating a footstep, the material demonstrated an output power of 2.73 μW when connected to a 65 MΩ resistive load.

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Optimization a structure of MEMS based PDMS ferroelectret for human body energy harvesting and sensing - Accepted Manuscript
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Accepted/In Press date: 26 April 2019
e-pub ahead of print date: 21 May 2019
Published date: July 2019

Identifiers

Local EPrints ID: 432086
URI: https://eprints.soton.ac.uk/id/eprint/432086
ISSN: 0964-1726
PURE UUID: ec51ad8d-305f-4037-aa08-f9fec4c4d173
ORCID for Zhenhua Luo: ORCID iD orcid.org/0000-0003-0766-6174
ORCID for Dibin Zhu: ORCID iD orcid.org/0000-0003-0517-3974
ORCID for Stephen Beeby: ORCID iD orcid.org/0000-0002-0800-1759

Catalogue record

Date deposited: 01 Jul 2019 16:30
Last modified: 29 Aug 2019 00:53

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