Photonic micro-structures produced by selective etching of laser-crystallized amorphous silicon
Photonic micro-structures produced by selective etching of laser-crystallized amorphous silicon
We present a method for the production of polycrystalline Si (poly-Si) photonic micro-structures based on laser writing. The method consists of local laser-induced crystallization of amorphous silicon (a-Si) followed by selective etching in chemical agents that act preferentially on the a-Si material, consequently revealing the poly-Si content of the film. We have studied the characteristics of these structures as a function of the laser processing parameters and we demonstrate their potential photonic functionality by fabricating polycrystalline silicon ridge optical waveguides. Preliminary waveguide transmission performance results indicated an optical transmission loss of 9 dB/cm in these unrefined devices.
2573-2581
Martinez-Jimenez, G.
6f3b34dd-33de-42b0-a69d-56e724da239b
Franz, Y.
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, A.F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Ceschia, M.
ea10050f-2846-47db-8c1f-58b6d21b50e9
Healy, N.
26eec85c-8d12-4f21-a67a-022f8dc2daab
Oo, S.Z.
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Peacock, A.C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Mailis, S.
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
1 June 2019
Martinez-Jimenez, G.
6f3b34dd-33de-42b0-a69d-56e724da239b
Franz, Y.
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, A.F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Ceschia, M.
ea10050f-2846-47db-8c1f-58b6d21b50e9
Healy, N.
26eec85c-8d12-4f21-a67a-022f8dc2daab
Oo, S.Z.
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Peacock, A.C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Mailis, S.
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Martinez-Jimenez, G., Franz, Y., Runge, A.F.J., Ceschia, M., Healy, N., Oo, S.Z., Tarazona, A., Chong, H.M.H., Peacock, A.C. and Mailis, S.
(2019)
Photonic micro-structures produced by selective etching of laser-crystallized amorphous silicon.
Optical Materials Express, 9 (6), .
(doi:10.1364/OME.9.002573).
Abstract
We present a method for the production of polycrystalline Si (poly-Si) photonic micro-structures based on laser writing. The method consists of local laser-induced crystallization of amorphous silicon (a-Si) followed by selective etching in chemical agents that act preferentially on the a-Si material, consequently revealing the poly-Si content of the film. We have studied the characteristics of these structures as a function of the laser processing parameters and we demonstrate their potential photonic functionality by fabricating polycrystalline silicon ridge optical waveguides. Preliminary waveguide transmission performance results indicated an optical transmission loss of 9 dB/cm in these unrefined devices.
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ome-9-6-2573
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Accepted/In Press date: 17 April 2019
e-pub ahead of print date: 14 May 2019
Published date: 1 June 2019
Identifiers
Local EPrints ID: 432094
URI: http://eprints.soton.ac.uk/id/eprint/432094
ISSN: 2159-3930
PURE UUID: bf80ef59-18c7-4f41-a479-aa938926293b
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Date deposited: 02 Jul 2019 16:30
Last modified: 23 Feb 2023 02:52
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Contributors
Author:
G. Martinez-Jimenez
Author:
Y. Franz
Author:
A.F.J. Runge
Author:
M. Ceschia
Author:
N. Healy
Author:
S.Z. Oo
Author:
A. Tarazona
Author:
H.M.H. Chong
Author:
S. Mailis
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