Martinez-Jimenez, G., Franz, Y., Runge, A.F.J., Ceschia, M., Healy, N., Oo, S.Z., Tarazona, A., Chong, H.M.H., Peacock, A.C. and Mailis, S. (2019) Photonic micro-structures produced by selective etching of laser-crystallized amorphous silicon. Optical Materials Express, 9 (6), 2573-2581. (doi:10.1364/OME.9.002573).
Abstract
We present a method for the production of polycrystalline Si (poly-Si) photonic micro-structures based on laser writing. The method consists of local laser-induced crystallization of amorphous silicon (a-Si) followed by selective etching in chemical agents that act preferentially on the a-Si material, consequently revealing the poly-Si content of the film. We have studied the characteristics of these structures as a function of the laser processing parameters and we demonstrate their potential photonic functionality by fabricating polycrystalline silicon ridge optical waveguides. Preliminary waveguide transmission performance results indicated an optical transmission loss of 9 dB/cm in these unrefined devices.
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- Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group
Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group - Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Fibre and Systems Group
Zepler Institute for Photonics and Nanoelectronics > Fibre and Systems Group - Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group > Photonic Systems Circuits and Sensors Group
Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group > Photonic Systems Circuits and Sensors Group - Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics
Zepler Institute for Photonics and Nanoelectronics - Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Sustainable Electronic Technologies
School of Electronics and Computer Science > Sustainable Electronic Technologies - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Optoelectronics Research Centre (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
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