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Photonic micro-structures produced by selective etching of laser-crystallized amorphous silicon

Photonic micro-structures produced by selective etching of laser-crystallized amorphous silicon
Photonic micro-structures produced by selective etching of laser-crystallized amorphous silicon

We present a method for the production of polycrystalline Si (poly-Si) photonic micro-structures based on laser writing. The method consists of local laser-induced crystallization of amorphous silicon (a-Si) followed by selective etching in chemical agents that act preferentially on the a-Si material, consequently revealing the poly-Si content of the film. We have studied the characteristics of these structures as a function of the laser processing parameters and we demonstrate their potential photonic functionality by fabricating polycrystalline silicon ridge optical waveguides. Preliminary waveguide transmission performance results indicated an optical transmission loss of 9 dB/cm in these unrefined devices.

2159-3930
2573-2581
Martinez-Jimenez, G.
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Franz, Y.
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, A.F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Ceschia, M.
ea10050f-2846-47db-8c1f-58b6d21b50e9
Healy, N.
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Oo, S.Z.
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, A.
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Chong, H.M.H.
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Peacock, A.C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Mailis, S.
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Martinez-Jimenez, G.
6f3b34dd-33de-42b0-a69d-56e724da239b
Franz, Y.
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, A.F.J.
874cec37-209b-4c7a-97a5-56d05596dd2b
Ceschia, M.
ea10050f-2846-47db-8c1f-58b6d21b50e9
Healy, N.
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Oo, S.Z.
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, A.
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Chong, H.M.H.
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Peacock, A.C.
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Mailis, S.
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4

Martinez-Jimenez, G., Franz, Y., Runge, A.F.J., Ceschia, M., Healy, N., Oo, S.Z., Tarazona, A., Chong, H.M.H., Peacock, A.C. and Mailis, S. (2019) Photonic micro-structures produced by selective etching of laser-crystallized amorphous silicon. Optical Materials Express, 9 (6), 2573-2581. (doi:10.1364/OME.9.002573).

Record type: Article

Abstract

We present a method for the production of polycrystalline Si (poly-Si) photonic micro-structures based on laser writing. The method consists of local laser-induced crystallization of amorphous silicon (a-Si) followed by selective etching in chemical agents that act preferentially on the a-Si material, consequently revealing the poly-Si content of the film. We have studied the characteristics of these structures as a function of the laser processing parameters and we demonstrate their potential photonic functionality by fabricating polycrystalline silicon ridge optical waveguides. Preliminary waveguide transmission performance results indicated an optical transmission loss of 9 dB/cm in these unrefined devices.

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Accepted/In Press date: 17 April 2019
e-pub ahead of print date: 14 May 2019
Published date: 1 June 2019

Identifiers

Local EPrints ID: 432094
URI: https://eprints.soton.ac.uk/id/eprint/432094
ISSN: 2159-3930
PURE UUID: bf80ef59-18c7-4f41-a479-aa938926293b
ORCID for H.M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for A.C. Peacock: ORCID iD orcid.org/0000-0002-1940-7172
ORCID for S. Mailis: ORCID iD orcid.org/0000-0001-8100-2670

Catalogue record

Date deposited: 02 Jul 2019 16:30
Last modified: 31 Jul 2019 00:48

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Contributors

Author: G. Martinez-Jimenez
Author: Y. Franz
Author: A.F.J. Runge
Author: M. Ceschia
Author: N. Healy
Author: S.Z. Oo
Author: A. Tarazona
Author: H.M.H. Chong ORCID iD
Author: A.C. Peacock ORCID iD
Author: S. Mailis ORCID iD

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