A multilayer thick-film PZT actuator for MEMs applications

Harris, N.R., Hill, M., Torah, R., Townsend, R., Beeby, S., White, N.M. and Ding, J. (2006) A multilayer thick-film PZT actuator for MEMs applications Sensors and Actuators A: Physical, 132, (1), pp. 311-316. (doi:10.1016/j.sna.2006.06.006).


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This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use in an ultrasonic flow-through separator, and its successful use is reported.

Item Type: Article
Digital Object Identifier (DOI): doi:10.1016/j.sna.2006.06.006
ePrint ID: 43344
Date :
Date Event
Date Deposited: 23 Jan 2007
Last Modified: 16 Apr 2017 18:49
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/43344

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