Gardes, Frederic, Lacava, Cosimo, Debnath, Kapil, Domínguez Bucio, Thalia, Banakar, Mehdi, Stanković, Stevan, Alattili, A., Khokhar, Ali, Saito, Shinichi, Petropoulos, Periklis, Molina-Fernández, Inigo, Halir, Robert, Ortega-Moñux, Alejandro, Wangüemert-Pérez, Juan Gonzalo, Chen, Yang, He, Jian-Jun, Cheben, Pavel and Schmid, Jens H. (2017) Tunable index back end of line platform for enhanced integrated photonics. In 2017 IEEE 14th International Conference on Group IV Photonics (GFP). IEEE.. (doi:10.1109/GROUP4.2017.8082208).
Abstract
We demonstrate a back end of line compatible SiN based material with tunable refractive index enabling low optical loss, high non-linear Kerr response, low index photonic crystals, high efficiency couplers, low loss waveguides and temperature tolerant MUX for DWDM.
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