Mouro, Joao, Rana, Sunil, Reynolds, Jamie, Chong, Harold and Pamunuwa, DInesh (2019) Estimating the surface adhesion force using pull-in/-out hysteresis in comb-drive devices. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. pp. 1981-1984 . (doi:10.1109/TRANSDUCERS.2019.8808684).
Abstract
Surface adhesion forces play a critical role in the operation of NEM relays, but characterization data for micro/nanoscale contact areas of relevant materials are scarce. A novel technique to estimate the adhesion force between two contacting surfaces is presented. This method uses the hysteresis in the pull-in/-out voltages measured experimentally in electrostatically actuated comb-drive and circular NEM devices with two contacting electrodes. In these geometries the electrostatic actuation force is independent of the device displacement and the surface adhesion forces can be analytically calculated from the force balance describing the pull-out event. Finite-element ANSYS simulations of the electromechanical behavior of the devices support the analytical approach. Adhesion forces of 0.081 μN and 0.167 μN were calculated for Au-Au and Ti-Ti contacts with areas of 750 nm × 300 nm and 100 nm × 300 nm, respectively.
Full text not available from this repository.
More information
Identifiers
Catalogue record
Export record
Altmetrics
Contributors
University divisions
- Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg) > Nanoelectronics and Nanotechnology (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Nanoelectronics and Nanotechnology (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Nanoelectronics and Nanotechnology (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg) > Sustainable Electronic Technologies (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Sustainable Electronic Technologies (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Sustainable Electronic Technologies (pre 2018 reorg) - Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Sustainable Electronic Technologies
School of Electronics and Computer Science > Sustainable Electronic Technologies
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.