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Laser-based fabrication of micromechanical diaphragms for pressure sensing using Bragg Gratings

Laser-based fabrication of micromechanical diaphragms for pressure sensing using Bragg Gratings
Laser-based fabrication of micromechanical diaphragms for pressure sensing using Bragg Gratings
Micromechanical devices are typically fabricated in expensive cleanrooms using techniques that are not conducive towards rapid and varied prototyping. This is typically because photolithography remains the main method for patterning of layers and should a small change be desired in the design, a new mask would have to be made, which is both a costly and slow process. This work reports a laser based approach for micromechanical diaphragm fabrication. The technique uses rapid thermal heating and subsequent quenching to a pattern a hard thermal oxide layer on a silicon substrate. This method used a computer controlled 9.3 micrometre wavelength CO2 laser beam to spot mark areas that were subsequently wet etched. This approach was found to be extremely repeatable and gave good consistency. It does not require cleanroom processing and is significantly more cost and time effective. Diaphragm feature size was observed to have a variability of <1% for diaphragms of several millimetres in size.
paper ce_8_4
OSA
Jantzen, Alexander
af05e45f-d153-4b8e-ae8b-6474fba5501a
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Jantzen, Senta, Lisa
e532e171-8ea3-4576-8843-17d96a3995d4
Boyd, Lewis J.
e3618773-5ac1-4c73-8dbc-4d74837a30da
Smith, Peter G R
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Jantzen, Alexander
af05e45f-d153-4b8e-ae8b-6474fba5501a
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Jantzen, Senta, Lisa
e532e171-8ea3-4576-8843-17d96a3995d4
Boyd, Lewis J.
e3618773-5ac1-4c73-8dbc-4d74837a30da
Smith, Peter G R
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263

Jantzen, Alexander, Gow, Paul C., Jantzen, Senta, Lisa, Boyd, Lewis J., Smith, Peter G R and Holmes, Christopher (2019) Laser-based fabrication of micromechanical diaphragms for pressure sensing using Bragg Gratings. In The European Conference on Lasers and Electro-Optics 2019. OSA. 1 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

Micromechanical devices are typically fabricated in expensive cleanrooms using techniques that are not conducive towards rapid and varied prototyping. This is typically because photolithography remains the main method for patterning of layers and should a small change be desired in the design, a new mask would have to be made, which is both a costly and slow process. This work reports a laser based approach for micromechanical diaphragm fabrication. The technique uses rapid thermal heating and subsequent quenching to a pattern a hard thermal oxide layer on a silicon substrate. This method used a computer controlled 9.3 micrometre wavelength CO2 laser beam to spot mark areas that were subsequently wet etched. This approach was found to be extremely repeatable and gave good consistency. It does not require cleanroom processing and is significantly more cost and time effective. Diaphragm feature size was observed to have a variability of <1% for diaphragms of several millimetres in size.

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More information

Published date: 27 June 2019
Venue - Dates: 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), Munich, Germany, 2019-06-23 - 2019-06-27

Identifiers

Local EPrints ID: 435044
URI: https://eprints.soton.ac.uk/id/eprint/435044
PURE UUID: afd0ef6d-ba50-420b-92ab-01a092549a67
ORCID for Paul C. Gow: ORCID iD orcid.org/0000-0002-3247-9082
ORCID for Senta, Lisa Jantzen: ORCID iD orcid.org/0000-0003-2646-7293
ORCID for Peter G R Smith: ORCID iD orcid.org/0000-0003-0319-718X
ORCID for Christopher Holmes: ORCID iD orcid.org/0000-0001-9021-3760

Catalogue record

Date deposited: 21 Oct 2019 16:30
Last modified: 03 Dec 2019 02:01

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