Laser trimming of the operating wavelength of silicon nitride racetrack resonators
Laser trimming of the operating wavelength of silicon nitride racetrack resonators
We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser. The results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral range. This process is much faster than similar, previously presented methods (in the order of seconds, compared to hours). This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.
Integrated Photonics, ring resonators, silicon nitride, silicon photonics
677-683
De Paoli, Greta
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Jantzen, Senta Lisa
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Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Skandalos, Ilias
8a38a06a-38fd-47fd-a469-1165fa7fe9ac
Holmes, Christopher
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Smith, Peter G.R.
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Milošević, Milan
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Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
De Paoli, Greta
eafc5c8a-e30a-40d1-a57e-0beb7f85af72
Jantzen, Senta Lisa
e532e171-8ea3-4576-8843-17d96a3995d4
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Skandalos, Ilias
8a38a06a-38fd-47fd-a469-1165fa7fe9ac
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
De Paoli, Greta, Jantzen, Senta Lisa, Domínguez Bucio, Thalia, Skandalos, Ilias, Holmes, Christopher, Smith, Peter G.R., Milošević, Milan and Gardes, Frederic
(2020)
Laser trimming of the operating wavelength of silicon nitride racetrack resonators.
Photonics Research, 8 (5), .
(doi:10.1364/PRJ.382529).
Abstract
We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser. The results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral range. This process is much faster than similar, previously presented methods (in the order of seconds, compared to hours). This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.
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Laser_Trimming_submitted
- Author's Original
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Laser trimming of the operating wavelength of silicon nitride racetrack resonators
- Accepted Manuscript
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Submitted date: 2019
Accepted/In Press date: 23 February 2020
e-pub ahead of print date: 25 February 2020
Keywords:
Integrated Photonics, ring resonators, silicon nitride, silicon photonics
Identifiers
Local EPrints ID: 435992
URI: http://eprints.soton.ac.uk/id/eprint/435992
ISSN: 2327-9125
PURE UUID: d99e37ef-7836-4faf-8a18-62234ba92ae8
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Date deposited: 26 Nov 2019 17:30
Last modified: 26 Nov 2020 05:01
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