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Laser trimming of the operating wavelength of silicon nitride racetrack resonators

Laser trimming of the operating wavelength of silicon nitride racetrack resonators
Laser trimming of the operating wavelength of silicon nitride racetrack resonators
We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser. The results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral range. This process is much faster than similar, previously presented methods (in the order of seconds, compared to hours). This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.
Integrated Photonics, ring resonators, silicon nitride, silicon photonics
2327-9125
677-683
De Paoli, Greta
eafc5c8a-e30a-40d1-a57e-0beb7f85af72
Jantzen, Senta Lisa
e532e171-8ea3-4576-8843-17d96a3995d4
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Skandalos, Ilias
3daa2bbe-f6ee-4b6e-ac57-46df0c21c732
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
De Paoli, Greta
eafc5c8a-e30a-40d1-a57e-0beb7f85af72
Jantzen, Senta Lisa
e532e171-8ea3-4576-8843-17d96a3995d4
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Skandalos, Ilias
3daa2bbe-f6ee-4b6e-ac57-46df0c21c732
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2

De Paoli, Greta, Jantzen, Senta Lisa, Domínguez Bucio, Thalia, Skandalos, Ilias, Holmes, Christopher, Smith, Peter G.R., Milošević, Milan and Gardes, Frederic (2020) Laser trimming of the operating wavelength of silicon nitride racetrack resonators. Photonics Research, 8 (5), 677-683. (doi:10.1364/PRJ.382529).

Record type: Article

Abstract

We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser. The results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral range. This process is much faster than similar, previously presented methods (in the order of seconds, compared to hours). This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.

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Laser trimming of the operating wavelength of silicon nitride racetrack resonators - Accepted Manuscript
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Submitted date: 2019
Accepted/In Press date: 23 February 2020
e-pub ahead of print date: 25 February 2020
Published date: 1 May 2020
Additional Information: Funding Information: Acknowledgment. The authors acknowledge the financial support of the Engineering and Physical Sciences Research Council (EPSRC) with the grants “Electronic-Photonic Convergence,” “Silicon Photonics for Future Systems,” “Quantum Integrated Nonlinear Technologies for Enabling Stable, Scaleable, Engineered Commercial Exploitation (QuINTESSEnCE),” “CORNERSTONE,” and “Rockley Photonics and the University of Southampton: A Prosperity Partnership.” This work was also supported by the Erasmus+ program of the European Union. The dataset for this paper is available at Ref. [53]. Publisher Copyright: Journal © 2020 Chinese Laser Press.
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Keywords: Integrated Photonics, ring resonators, silicon nitride, silicon photonics
Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Zepler Institute for Photonics and Nanoelectronics research

Identifiers

Local EPrints ID: 435992
URI: http://eprints.soton.ac.uk/id/eprint/435992
DOI: doi:10.1364/PRJ.382529
ISSN: 2327-9125
PURE UUID: d99e37ef-7836-4faf-8a18-62234ba92ae8
ORCID for Senta Lisa Jantzen: ORCID iD orcid.org/0000-0003-2646-7293
ORCID for Thalia Domínguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for Christopher Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for Peter G.R. Smith: ORCID iD orcid.org/0000-0003-0319-718X
ORCID for Frederic Gardes: ORCID iD orcid.org/0000-0003-1400-3272

Catalogue record

Date deposited: 26 Nov 2019 17:30
Last modified: 17 Mar 2024 05:05

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Contributors

Author: Greta De Paoli
Author: Senta Lisa Jantzen ORCID iD
Author: Thalia Domínguez Bucio ORCID iD
Author: Ilias Skandalos
Author: Christopher Holmes ORCID iD
Author: Peter G.R. Smith ORCID iD
Author: Milan Milošević
Author: Frederic Gardes ORCID iD

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