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Optical metrology for the morphological characterization of surfaces: limitations, innovations, registration, and new directions

Optical metrology for the morphological characterization of surfaces: limitations, innovations, registration, and new directions
Optical metrology for the morphological characterization of surfaces: limitations, innovations, registration, and new directions
An overview is provided of the non-contact measurement of surface morphology, focusing on form and roughness. Existing methods considered include con-focal scanning methods for the evaluation of large-scale surfaces where comparisons are drawn with direct areal measurements where data stitching is required to provide coverage of large scale surfaces. The applications of large-scale surfaces presented include, free form dental metrology, paleontology and early cylindrical mechanical sound recordings. Data registration of free form surfaces is presented to determine low scale wear of dental surfaces. For the new directions, consideration is given to the application of precision X-ray computer tomography, to determine free form surfaces and applied to the dental surfaces. The results show that the con-focal method remains the best solution for complex free form surfaces and that the XCT systems while offering some advantages require further research for full application.
SPIE
Mcbride, John W.
d9429c29-9361-4747-9ba3-376297cb8770
Cross, Kevin J.
5d1be829-cbca-4289-af85-764649a416a4
Bull, Thomas
f3f00de4-1bfa-42c4-b957-dbd95a1a9aa2
Han, Sen
Yoshizawa, Toru
Zhang, Song
Chen, Benyong
Mcbride, John W.
d9429c29-9361-4747-9ba3-376297cb8770
Cross, Kevin J.
5d1be829-cbca-4289-af85-764649a416a4
Bull, Thomas
f3f00de4-1bfa-42c4-b957-dbd95a1a9aa2
Han, Sen
Yoshizawa, Toru
Zhang, Song
Chen, Benyong

Mcbride, John W., Cross, Kevin J. and Bull, Thomas (2019) Optical metrology for the morphological characterization of surfaces: limitations, innovations, registration, and new directions. Han, Sen, Yoshizawa, Toru, Zhang, Song and Chen, Benyong (eds.) In Proceedings Volume 11189, Optical Metrology and Inspection for Industrial Applications VI. vol. 11189, SPIE. 9 pp . (doi:10.1117/12.2540438).

Record type: Conference or Workshop Item (Paper)

Abstract

An overview is provided of the non-contact measurement of surface morphology, focusing on form and roughness. Existing methods considered include con-focal scanning methods for the evaluation of large-scale surfaces where comparisons are drawn with direct areal measurements where data stitching is required to provide coverage of large scale surfaces. The applications of large-scale surfaces presented include, free form dental metrology, paleontology and early cylindrical mechanical sound recordings. Data registration of free form surfaces is presented to determine low scale wear of dental surfaces. For the new directions, consideration is given to the application of precision X-ray computer tomography, to determine free form surfaces and applied to the dental surfaces. The results show that the con-focal method remains the best solution for complex free form surfaces and that the XCT systems while offering some advantages require further research for full application.

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SPIE China 2019_111890S
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More information

Published date: 18 November 2019
Venue - Dates: Optical Metrology and Inspection for Industrial Applications VI, , Hangzhou, China, 2019-10-20 - 2019-10-23

Identifiers

Local EPrints ID: 436213
URI: http://eprints.soton.ac.uk/id/eprint/436213
PURE UUID: 302853e3-e9d8-49dd-add4-219976015d26
ORCID for John W. Mcbride: ORCID iD orcid.org/0000-0002-3024-0326

Catalogue record

Date deposited: 04 Dec 2019 17:30
Last modified: 16 Apr 2024 01:32

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Contributors

Author: John W. Mcbride ORCID iD
Author: Kevin J. Cross
Author: Thomas Bull
Editor: Sen Han
Editor: Toru Yoshizawa
Editor: Song Zhang
Editor: Benyong Chen

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