Genetic algorithm for the design of freeform geometries in a MEMS accelerometer comprising a mechanical motion pre-amplifier

Wang, Chen, Liu, Huafeng, Song, Xiaoxiao, Fang, Chen, Zeimpekis, Ioannis, Wang, Yuan, Wang, Kaiwei, Bai, Jian and Kraft, Michael (2019) Genetic algorithm for the design of freeform geometries in a MEMS accelerometer comprising a mechanical motion pre-amplifier. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). IEEE. pp. 2099-2102 . (doi:10.1109/TRANSDUCERS.2019.8808710).

Abstract

This paper describes a novel, semi-automated design methodology based on a genetic algorithm using freeform geometries for micro-electro-mechanical systems (MEMS) devices. The use of freeform geometries allows higher degrees of freedom in the design process, improving the diversity and performance of MEMS devices. A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach. Experimental results show a figure of merit (defined as the product of sensitivity and bandwidth frequency) improvement by 100% and a sensitivity improvement by 141% compared to a device designed by a conventional way.

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Contributors

Author: Ioannis Zeimpekis

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