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Mid-infrared nanometallic antenna assisted silicon waveguide based bolometers

Mid-infrared nanometallic antenna assisted silicon waveguide based bolometers
Mid-infrared nanometallic antenna assisted silicon waveguide based bolometers
The mid-infrared (MIR) wavelength region is attracting more and more research for applications such as medical diagnostics, environmental monitoring, and free space communications. In the MIR, thermal detectors play an important role because they can operate over a large wavelength range, can be fabricated using CMOS compatible processes, and do not require cooling. Today no other MIR detector technology is able to fill this gap. We demonstrate the first uncooled silicon waveguide-based bolometers, in the Silicon-on-Insulator (SOI) and suspended silicon waveguide platforms. The bolometers comprise gold plasmonic antennas on the waveguide surface that heat up when they absorb light, and amorphous silicon thermometers (formed by ion implantation), whose electrical resistance changes by 0.90 ± 0.26 % K-1 when they are heated. We show that suspending the bolometers improves their performance, and achieve sensitivities of up to 1.13 ± 0.04 % change in resistance per milliwatt of input power, with a noise equivalent power of 66 μW/√Hz. Calculations suggest the NEP could in future, be further reduced by 4 orders of magnitude.
2330-4022
3253-3260
Wu, Yangbo
000d8846-20f2-4cea-b496-f6f4b73a171f
Qu, Zhibo
ff376b43-4352-4bd2-8420-c1c6cfccd45c
Osman, Ahmed
eb387b50-c718-47df-ac90-97b2efd3e335
Cao, Wei
5202fa2b-a471-45d4-84e9-9104dffdbbfc
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Soler Penadés, Jordi
f18f3619-0d71-4547-95fd-dd38c37b7adb
Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Nedeljković, Milos
b64e21c2-1b95-479d-a35c-3456dff8c796
Wu, Yangbo
000d8846-20f2-4cea-b496-f6f4b73a171f
Qu, Zhibo
ff376b43-4352-4bd2-8420-c1c6cfccd45c
Osman, Ahmed
eb387b50-c718-47df-ac90-97b2efd3e335
Cao, Wei
5202fa2b-a471-45d4-84e9-9104dffdbbfc
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Soler Penadés, Jordi
f18f3619-0d71-4547-95fd-dd38c37b7adb
Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Nedeljković, Milos
b64e21c2-1b95-479d-a35c-3456dff8c796

Wu, Yangbo, Qu, Zhibo, Osman, Ahmed, Cao, Wei, Khokhar, Ali, Soler Penadés, Jordi, Muskens, Otto, Mashanovich, Goran and Nedeljković, Milos (2019) Mid-infrared nanometallic antenna assisted silicon waveguide based bolometers. ACS Photonics, 6 (12), 3253-3260. (doi:10.1021/acsphotonics.9b01198).

Record type: Article

Abstract

The mid-infrared (MIR) wavelength region is attracting more and more research for applications such as medical diagnostics, environmental monitoring, and free space communications. In the MIR, thermal detectors play an important role because they can operate over a large wavelength range, can be fabricated using CMOS compatible processes, and do not require cooling. Today no other MIR detector technology is able to fill this gap. We demonstrate the first uncooled silicon waveguide-based bolometers, in the Silicon-on-Insulator (SOI) and suspended silicon waveguide platforms. The bolometers comprise gold plasmonic antennas on the waveguide surface that heat up when they absorb light, and amorphous silicon thermometers (formed by ion implantation), whose electrical resistance changes by 0.90 ± 0.26 % K-1 when they are heated. We show that suspending the bolometers improves their performance, and achieve sensitivities of up to 1.13 ± 0.04 % change in resistance per milliwatt of input power, with a noise equivalent power of 66 μW/√Hz. Calculations suggest the NEP could in future, be further reduced by 4 orders of magnitude.

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e-pub ahead of print date: 21 November 2019
Published date: 18 December 2019

Identifiers

Local EPrints ID: 436426
URI: http://eprints.soton.ac.uk/id/eprint/436426
ISSN: 2330-4022
PURE UUID: 78893cd0-0e66-4554-ba90-89f5f7036312
ORCID for Ahmed Osman: ORCID iD orcid.org/0000-0001-6575-3861
ORCID for Jordi Soler Penadés: ORCID iD orcid.org/0000-0002-1706-8533
ORCID for Otto Muskens: ORCID iD orcid.org/0000-0003-0693-5504
ORCID for Milos Nedeljković: ORCID iD orcid.org/0000-0002-9170-7911

Catalogue record

Date deposited: 10 Dec 2019 17:30
Last modified: 27 Jan 2020 13:52

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