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Nanocrystalline graphite humidity sensors for wearable breath monitoring applications

Nanocrystalline graphite humidity sensors for wearable breath monitoring applications
Nanocrystalline graphite humidity sensors for wearable breath monitoring applications
A wearable humidity sensing platform based on nanocrystalline graphite (NCG) resistive sensors for continuous breath pattern analysis is reported in this paper. The sensor was fabricated using plasma enhanced chemical vapour deposition (PECVD) to grow graphitic nanocrystals directly onto SiO 2 substrates without metal catalysts. The resulting sensor shows suitably fast response, and high durability against contaminants. The film also demonstrates good mechanical stability and can be integrated with existing CMOS production technology to produce a complete system on chip (SoC) sensor for smart wearable applications. When exposed to human breath (~100% RH) from room conditions (~40% RH), the sensor experiences a measurable ~100 Ohm drop in resistance, with a 2 seconds response from 100% RH to 40% RH. The resulting sensor is small and can easily be integrated into a wearable smart-mask for breath analysis.
1-4
IEEE
Ling, Ting Yang
67472eb1-3e63-41c6-8435-d6bc5b0b4f78
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Mcbride, John
d9429c29-9361-4747-9ba3-376297cb8770
Lee, Hing Wah
9d0f3634-dd4d-411c-aee0-6bd16b5471d5
Ling, Ting Yang
67472eb1-3e63-41c6-8435-d6bc5b0b4f78
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Mcbride, John
d9429c29-9361-4747-9ba3-376297cb8770
Lee, Hing Wah
9d0f3634-dd4d-411c-aee0-6bd16b5471d5

Ling, Ting Yang, Pu, Suan-Hui, Chong, Harold, Mcbride, John and Lee, Hing Wah (2019) Nanocrystalline graphite humidity sensors for wearable breath monitoring applications. In 2019 IEEE International Conference on Sensors and Nanotechnology. IEEE. pp. 1-4 . (doi:10.1109/SENSORSNANO44414.2019.8940050).

Record type: Conference or Workshop Item (Paper)

Abstract

A wearable humidity sensing platform based on nanocrystalline graphite (NCG) resistive sensors for continuous breath pattern analysis is reported in this paper. The sensor was fabricated using plasma enhanced chemical vapour deposition (PECVD) to grow graphitic nanocrystals directly onto SiO 2 substrates without metal catalysts. The resulting sensor shows suitably fast response, and high durability against contaminants. The film also demonstrates good mechanical stability and can be integrated with existing CMOS production technology to produce a complete system on chip (SoC) sensor for smart wearable applications. When exposed to human breath (~100% RH) from room conditions (~40% RH), the sensor experiences a measurable ~100 Ohm drop in resistance, with a 2 seconds response from 100% RH to 40% RH. The resulting sensor is small and can easily be integrated into a wearable smart-mask for breath analysis.

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More information

Published date: 24 July 2019

Identifiers

Local EPrints ID: 437479
URI: http://eprints.soton.ac.uk/id/eprint/437479
PURE UUID: 99e0f621-dcf2-4a1b-b7fa-18789932b206
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 31 Jan 2020 17:31
Last modified: 26 Nov 2021 03:15

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Contributors

Author: Ting Yang Ling
Author: Suan-Hui Pu ORCID iD
Author: Harold Chong ORCID iD
Author: John Mcbride
Author: Hing Wah Lee

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