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Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications

Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications
Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications
We report results of laser processing on amorphous silicon and silicon-germanium films deposited on planar substrates. Pre-patterned a-Si waveguides were recrystallized and reflowed to enhance their material and optical properties. Formation of millimeter long crystal grains and surface roughness of 0.52 nm enable optical losses to become as low as 5.3 dB/cm. Laser-driven phase separation in the binary alloy of a-SiGe allows fabrication of composition graded microstructures with Si-rich and Ge-rich regions. A composition tuning capability of 40% was demonstrated.
Laser processing, amorphous semiconductors, SiGe, Optical waveguides, semiconductor alloys, phase segregation
Aktas, Ozan
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Franz, Yohann
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Runge, Antoine
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MacFarquhar, Stuart, James
cff30fb5-a4b6-44ab-b1b3-138e7020fba3
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Tarazona, Antulio
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Chong, Harold
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Mailis, Sakellaris
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Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Aktas, Ozan
2e90db41-f409-431f-9827-2e2577a52457
Franz, Yohann
023ff50d-4172-4d4f-9a20-bb365820fb5d
Runge, Antoine
24fd1d59-5328-4201-8eb3-172f237563fa
MacFarquhar, Stuart, James
cff30fb5-a4b6-44ab-b1b3-138e7020fba3
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Mailis, Sakellaris
9fcc2cc8-9c00-452e-b785-a20263cfb33b
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc

Aktas, Ozan, Franz, Yohann, Runge, Antoine, MacFarquhar, Stuart, James, Oo, Swe, Mittal, Vinita, Tarazona, Antulio, Chong, Harold, Mailis, Sakellaris and Peacock, Anna (2019) Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications. Meta 2019: 10th International Conference on Metamaterials, Photonic Crystals and Plasmonics, Portugal. 23 - 26 Jul 2019. 2 pp .

Record type: Conference or Workshop Item (Other)

Abstract

We report results of laser processing on amorphous silicon and silicon-germanium films deposited on planar substrates. Pre-patterned a-Si waveguides were recrystallized and reflowed to enhance their material and optical properties. Formation of millimeter long crystal grains and surface roughness of 0.52 nm enable optical losses to become as low as 5.3 dB/cm. Laser-driven phase separation in the binary alloy of a-SiGe allows fabrication of composition graded microstructures with Si-rich and Ge-rich regions. A composition tuning capability of 40% was demonstrated.

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Published date: 26 July 2019
Venue - Dates: Meta 2019: 10th International Conference on Metamaterials, Photonic Crystals and Plasmonics, Portugal, 2019-07-23 - 2019-07-26
Keywords: Laser processing, amorphous semiconductors, SiGe, Optical waveguides, semiconductor alloys, phase segregation

Identifiers

Local EPrints ID: 437612
URI: http://eprints.soton.ac.uk/id/eprint/437612
PURE UUID: 1f322200-5d4b-4d8a-9df1-7a86a3333b39
ORCID for Ozan Aktas: ORCID iD orcid.org/0000-0002-2255-7761
ORCID for Stuart, James MacFarquhar: ORCID iD orcid.org/0000-0002-4378-7670
ORCID for Vinita Mittal: ORCID iD orcid.org/0000-0003-4836-5327
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 06 Feb 2020 17:32
Last modified: 07 Feb 2020 01:39

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