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Nanoelectromechanical relay without pull-in instability for high-temperature non-volatile memory

Nanoelectromechanical relay without pull-in instability for high-temperature non-volatile memory
Nanoelectromechanical relay without pull-in instability for high-temperature non-volatile memory
Emerging applications such as the Internet-of-Things and more-electric aircraft require electronics with integrated data storage that can operate in extreme temperatures with high energy efficiency. As transistor leakage current increases with temperature, nanoelectromechanical relays have emerged as a promising alternative. However, a reliable and scalable non-volatile relay that retains its state when powered off has not been demonstrated. Part of the challenge is electromechanical pull-in instability, causing the beam to snap in after traversing a section of the airgap. Here we demonstrate an electrostatically actuated nanoelectromechanical relay that eliminates electromechanical pull-in instability without restricting the dynamic range of motion. It has several advantages over conventional electrostatic relays, including low actuation voltages without extreme reduction in critical dimensions and near constant actuation airgap while the device moves, for improved electrostatic control. With this nanoelectromechanical relay we demonstrate the first high-temperature non-volatile relay operation, with over 40 non-volatile cycles at 200 ∘C.
2041-1723
Rana, Sunil
16726f81-3e09-45e4-b07b-944e7679e8ca
Mouro, Joao
ad37ac45-f4bb-4d95-96c4-3f64f885ac29
Bleiker, Simon J
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Reynolds, Jamie Dean
96faa744-02ee-458c-8e48-953ea9e54afe
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Niklaus, Frank
c0736bfc-ea35-453e-b17e-ecf931d029ee
Pamunuwa, Dinesh
cf57fb7f-b05a-48d0-a9ef-2aca5f411cc3
Rana, Sunil
16726f81-3e09-45e4-b07b-944e7679e8ca
Mouro, Joao
ad37ac45-f4bb-4d95-96c4-3f64f885ac29
Bleiker, Simon J
6c9ee820-913e-4f01-b030-2645a872d9f0
Reynolds, Jamie Dean
96faa744-02ee-458c-8e48-953ea9e54afe
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Niklaus, Frank
c0736bfc-ea35-453e-b17e-ecf931d029ee
Pamunuwa, Dinesh
cf57fb7f-b05a-48d0-a9ef-2aca5f411cc3

Rana, Sunil, Mouro, Joao, Bleiker, Simon J, Reynolds, Jamie Dean, Chong, Harold, Niklaus, Frank and Pamunuwa, Dinesh (2020) Nanoelectromechanical relay without pull-in instability for high-temperature non-volatile memory. Nature Communications, 11, [1181]. (doi:10.1038/s41467-020-14872-2).

Record type: Article

Abstract

Emerging applications such as the Internet-of-Things and more-electric aircraft require electronics with integrated data storage that can operate in extreme temperatures with high energy efficiency. As transistor leakage current increases with temperature, nanoelectromechanical relays have emerged as a promising alternative. However, a reliable and scalable non-volatile relay that retains its state when powered off has not been demonstrated. Part of the challenge is electromechanical pull-in instability, causing the beam to snap in after traversing a section of the airgap. Here we demonstrate an electrostatically actuated nanoelectromechanical relay that eliminates electromechanical pull-in instability without restricting the dynamic range of motion. It has several advantages over conventional electrostatic relays, including low actuation voltages without extreme reduction in critical dimensions and near constant actuation airgap while the device moves, for improved electrostatic control. With this nanoelectromechanical relay we demonstrate the first high-temperature non-volatile relay operation, with over 40 non-volatile cycles at 200 ∘C.

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Accepted/In Press date: 31 January 2020
Published date: 4 March 2020

Identifiers

Local EPrints ID: 438565
URI: http://eprints.soton.ac.uk/id/eprint/438565
ISSN: 2041-1723
PURE UUID: 1cde439a-b1d2-4036-b77f-de9b33a7e6ed
ORCID for Jamie Dean Reynolds: ORCID iD orcid.org/0000-0002-0072-0134
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761

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Date deposited: 17 Mar 2020 17:30
Last modified: 18 Mar 2020 01:32

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Contributors

Author: Sunil Rana
Author: Joao Mouro
Author: Simon J Bleiker
Author: Jamie Dean Reynolds ORCID iD
Author: Harold Chong ORCID iD
Author: Frank Niklaus
Author: Dinesh Pamunuwa

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