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Microprinting and microetching of diffractive structures using ultrashort laser pulses

Microprinting and microetching of diffractive structures using ultrashort laser pulses
Microprinting and microetching of diffractive structures using ultrashort laser pulses
Two complementary methods, the microetching and the microdeposition, of materials using ultrashort pulses of ultraviolet (UV) laser radiation for the fabrication of diffractive structures are presented. Microetching of various solid materials (polymers, metals) using femtosecond excimer lasers produces high definition micron diffractive patterns. The microdeposition method utilizes the selective microablation and transfer of thin metallic films for achieving microstructures of dots, lines and complicated multilevel patterns with micron and even submicron resolution. The short pulse length and the consequent limited thermal diffusion, lowers the ablation threshold and enables the machining and the deposition of high definition features. The superior quality of the results allows the direct, in-one-step process, fabrication of binary amplitude and multilevel optical diffractive structures on planar and cylindrical substrates such as optical fibres.
0169-4332
82-86
Zergioti, I.
97fd5ac7-1c63-4bc3-a2b6-3ecea9dd86f1
Mailis, S.
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Vainos, N.A.
3288f903-d80b-4b39-9042-26106eb3f064
Ikiades, A.
6b4f12e0-7ded-43fb-8a61-e2b725f65cb3
Grigoropoulos, C.P.
e5adace1-7f92-4407-9f82-61a2e075ea41
Fotakis, C.
51429efa-20ae-4c9d-a8c3-954431cf8182
Zergioti, I.
97fd5ac7-1c63-4bc3-a2b6-3ecea9dd86f1
Mailis, S.
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Vainos, N.A.
3288f903-d80b-4b39-9042-26106eb3f064
Ikiades, A.
6b4f12e0-7ded-43fb-8a61-e2b725f65cb3
Grigoropoulos, C.P.
e5adace1-7f92-4407-9f82-61a2e075ea41
Fotakis, C.
51429efa-20ae-4c9d-a8c3-954431cf8182

Zergioti, I., Mailis, S., Vainos, N.A., Ikiades, A., Grigoropoulos, C.P. and Fotakis, C. (1999) Microprinting and microetching of diffractive structures using ultrashort laser pulses. Applied Surface Science, 138-139, 82-86. (doi:10.1016/S0169-4332(98)00526-1).

Record type: Article

Abstract

Two complementary methods, the microetching and the microdeposition, of materials using ultrashort pulses of ultraviolet (UV) laser radiation for the fabrication of diffractive structures are presented. Microetching of various solid materials (polymers, metals) using femtosecond excimer lasers produces high definition micron diffractive patterns. The microdeposition method utilizes the selective microablation and transfer of thin metallic films for achieving microstructures of dots, lines and complicated multilevel patterns with micron and even submicron resolution. The short pulse length and the consequent limited thermal diffusion, lowers the ablation threshold and enables the machining and the deposition of high definition features. The superior quality of the results allows the direct, in-one-step process, fabrication of binary amplitude and multilevel optical diffractive structures on planar and cylindrical substrates such as optical fibres.

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More information

Published date: January 1999

Identifiers

Local EPrints ID: 440938
URI: http://eprints.soton.ac.uk/id/eprint/440938
ISSN: 0169-4332
PURE UUID: 534ea6d8-ca9c-4232-b62a-f1b61c81a045
ORCID for S. Mailis: ORCID iD orcid.org/0000-0001-8100-2670

Catalogue record

Date deposited: 22 May 2020 16:40
Last modified: 23 May 2020 00:26

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Contributors

Author: I. Zergioti
Author: S. Mailis ORCID iD
Author: N.A. Vainos
Author: A. Ikiades
Author: C.P. Grigoropoulos
Author: C. Fotakis

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