The enclosed data are corresponding to the figures in published work. 
Embedded Metal Oxide Plasmonics Using Local Plasma Oxidation of AZO for Planar Metasurfaces
https://doi.org/10.1002/adma.202001534

Each figure file in Excel format contain multi-sheets for each subfigure when applicable.
The data are numerical data with labeling. 

Figure 1\Fig.1a Mean and standard deviation of carrier concentration versus Al cycle ratio before and after plasma treatment.
Figure 1\Fig.1b Carrier concentration versus plasma treatment time for different Al cycle ratios (0-5%).
Figure 1\Fig.1c Transmission spectra vs wavelength for before and after plasma treatment. Data includes CaF2 UV-Vis and FTIR spectra in two seperate columns.
Figure 1\Fig.1d Real and imaginary permitivities versus wavelength for AZO before and after plasma treatment. Real permitivity at 0 is plotted in the figure but not included in the data.
Figure 2\Fig.2g Height versus position from AFM profile cutline.
Figure 2\Fig.2h Height versus position from AFM profile cutline.
Figure 3\Fig.3a IR spectra versus wavelength from FTIR measurements. Data includes planar film and AZO features.
Figure 3\Fig.3b IR spectra versus wavelength from FTIR measurements. Data includes planar film and AZO features.
Figure 3\Fig.3c Numerically simulated spectra versus wavelength. Data includes planar film and AZO features.
Figure 3\Fig.3d Numerically simulated spectra versus wavelength. Data includes planar film and AZO features.
Figure 4\Fig.4d Height vs position from AFM profile cutline.
Figure 5\Fig.5a Measured visble transmission spectra versus wavelength for different AZO features with CaF2 reference.
Figure 5\Fig.5b Measured IR transmission spectra versus wavelength for different AZO features with CaF2 reference.
Figure 5\Fig.5c Simulated visble transmission versus wavelength for different AZO features and CaF2 reference.
Figure 5\Fig.5d Simulated IR transmission versus wavelength for different AZO features and CaF2 reference.
Figure 5\Fig.5e Measured visble transmission spectra versus wavelength for different Au features with CaF2 reference.
Figure 5\Fig.5f Measured IR transmission spectra versus wavelength for different Au features with CaF2 reference.
Figure 5\Fig.5g Simulated visble transmission spectra versus wavelength for different Au features with CaF2 reference.
Figure 5\Fig.5h Simulated IR transmission spectra versus wavelength for different Au features with CaF2 reference.