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Embedded metal oxide plasmonics using local plasma oxidation of AZO for planar metasurfaces

Embedded metal oxide plasmonics using local plasma oxidation of AZO for planar metasurfaces
Embedded metal oxide plasmonics using local plasma oxidation of AZO for planar metasurfaces

New methods for achieving high-quality conducting oxide metasurfaces are of great importance for a range of emerging applications from infrared thermal control coatings to epsilon-near-zero nonlinear optics. This work demonstrates the viability of plasma patterning as a technique to selectively and locally modulate the carrier density in planar Al-doped ZnO (AZO) metasurfaces without any associated topographical surface profile. This technique stands in strong contrast to conventional physical patterning which results in nonplanar textured surfaces. The approach can open up a new route to form novel photonic devices with planar metasurfaces, for example, antireflective coatings and multi-layer devices. To demonstrate the performance of the carrier-modulated AZO metasurfaces, two types of devices are realized using the demonstrated plasma patterning. A metasurface optical solar reflector is shown to produce infrared emissivity equivalent to a conventional etched design. Second, a multiband metasurface is achieved by integrating a Au visible-range metasurface on top of the planar AZO infrared metasurface. Independent control of spectral bands without significant cross-talk between infrared and visible functionalities is achieved. Local carrier tuning of conducting oxide films offers a conceptually new approach for oxide-based photonics and nanoelectronics and opens up new routes for integrated planar metasurfaces in optical technology.

aluminum zinc oxide, carrier modulation, metal oxide, multi metasurfaces, optical solar reflectors, oxygen plasma, plasma patterning, transparent conductive oxides
1521-4095
Sun, Kai
572b5f93-dfb9-495c-8e82-52a9d373b0ed
Xiao, Wei
20758ef4-698c-46e5-bb9b-a97db7340379
Ye, Sheng
41d5b4a0-6d97-43a2-a1fa-7cdbbf5bc1cd
Kalfagiannis, Nikolaos
0d1b62c6-6e8e-4d55-b448-0ca2486a5407
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
de Groot, C H Kees
92cd2e02-fcc4-43da-8816-c86f966be90c
Muskens, Otto L.
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Sun, Kai
572b5f93-dfb9-495c-8e82-52a9d373b0ed
Xiao, Wei
20758ef4-698c-46e5-bb9b-a97db7340379
Ye, Sheng
41d5b4a0-6d97-43a2-a1fa-7cdbbf5bc1cd
Kalfagiannis, Nikolaos
0d1b62c6-6e8e-4d55-b448-0ca2486a5407
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
de Groot, C H Kees
92cd2e02-fcc4-43da-8816-c86f966be90c
Muskens, Otto L.
2284101a-f9ef-4d79-8951-a6cda5bfc7f9

Sun, Kai, Xiao, Wei, Ye, Sheng, Kalfagiannis, Nikolaos, Kiang, Kian Shen, de Groot, C H Kees and Muskens, Otto L. (2020) Embedded metal oxide plasmonics using local plasma oxidation of AZO for planar metasurfaces. Advanced Materials, 32 (25), [e2001534]. (doi:10.1002/adma.202001534).

Record type: Article

Abstract

New methods for achieving high-quality conducting oxide metasurfaces are of great importance for a range of emerging applications from infrared thermal control coatings to epsilon-near-zero nonlinear optics. This work demonstrates the viability of plasma patterning as a technique to selectively and locally modulate the carrier density in planar Al-doped ZnO (AZO) metasurfaces without any associated topographical surface profile. This technique stands in strong contrast to conventional physical patterning which results in nonplanar textured surfaces. The approach can open up a new route to form novel photonic devices with planar metasurfaces, for example, antireflective coatings and multi-layer devices. To demonstrate the performance of the carrier-modulated AZO metasurfaces, two types of devices are realized using the demonstrated plasma patterning. A metasurface optical solar reflector is shown to produce infrared emissivity equivalent to a conventional etched design. Second, a multiband metasurface is achieved by integrating a Au visible-range metasurface on top of the planar AZO infrared metasurface. Independent control of spectral bands without significant cross-talk between infrared and visible functionalities is achieved. Local carrier tuning of conducting oxide films offers a conceptually new approach for oxide-based photonics and nanoelectronics and opens up new routes for integrated planar metasurfaces in optical technology.

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More information

Accepted/In Press date: 27 April 2020
e-pub ahead of print date: 17 May 2020
Published date: 1 June 2020
Keywords: aluminum zinc oxide, carrier modulation, metal oxide, multi metasurfaces, optical solar reflectors, oxygen plasma, plasma patterning, transparent conductive oxides

Identifiers

Local EPrints ID: 441370
URI: http://eprints.soton.ac.uk/id/eprint/441370
ISSN: 1521-4095
PURE UUID: 832af27a-31b6-4efa-9c19-7ab6ed1aa3a5
ORCID for Wei Xiao: ORCID iD orcid.org/0000-0002-3898-1110
ORCID for Kian Shen Kiang: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for C H Kees de Groot: ORCID iD orcid.org/0000-0002-3850-7101
ORCID for Otto L. Muskens: ORCID iD orcid.org/0000-0003-0693-5504

Catalogue record

Date deposited: 10 Jun 2020 16:31
Last modified: 18 Feb 2021 17:29

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