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MEMS actuation device and method

MEMS actuation device and method
MEMS actuation device and method
Harris, Nicholas

Harris, Nicholas (Inventors) (2020) MEMS actuation device and method.

Record type: Patent
86709763PCT01 Filed App - Author's Original
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Published date: 29 May 2020


Local EPrints ID: 441390
PURE UUID: c58ef069-5a2a-4dbe-9bed-3597259c92f3
ORCID for Nicholas Harris: ORCID iD

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Date deposited: 11 Jun 2020 16:30
Last modified: 17 Mar 2024 02:39

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Inventor: Nicholas Harris ORCID iD

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