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Selective chemical vapor deposition approach for Sb2Te3 thin film micro-thermoelectric generators

Selective chemical vapor deposition approach for Sb2Te3 thin film micro-thermoelectric generators
Selective chemical vapor deposition approach for Sb2Te3 thin film micro-thermoelectric generators

Micro-thermoelectric generators are attractive for autonomous sensor systems. This work reports an approach for fabricating thin film micro-thermoelectric generators via selective chemical vapor deposition. The approach utilizes our single-source precursors, which enable the production of high-quality thermoelectric materials, as exemplified by Sb2Te3 in this work. It also allows great control over the thermoelectric properties of the as-deposited Sb2Te3 by simply varying the deposition temperature. A competitive power factor of 16.5 μW/(cm·K2) can be obtained for a Sb2Te3 film deposited at 364 °C, with the highest estimated ZT value of 0.65. The selective deposition over the conductive TiN surface enables the fabrication of a prototype single-leg thermoelectric generator, which produces a maximum power of 0.27 nW, with a temperature gradient of only 0.11 K while reducing 87% of tellurium consumption.

Sb Te, micro-thermoelectric generator, selective chemical vapor deposition, single-source precursor, thin film
2574-0962
5840-5846
Newbrook, Daniel William
380b603a-3de2-40d3-b008-2fa079341513
Richards, Stephen P.
ebe5e699-553f-408b-ab9d-d20270e952c1
Greenacre, Victoria
c665a38b-0b1a-4671-ac75-bf0679dd1c57
Hector, Andrew L.
f19a8f31-b37f-4474-b32a-b7cf05b9f0e5
Levason, William
e7f6d7c7-643c-49f5-8b57-0ebbe1bb52cd
Reid, Gillian
37d35b11-40ce-48c5-a68e-f6ce04cd4037
De Groot, Cornelis
92cd2e02-fcc4-43da-8816-c86f966be90c
Huang, Ruomeng
c6187811-ef2f-4437-8333-595c0d6ac978
Newbrook, Daniel William
380b603a-3de2-40d3-b008-2fa079341513
Richards, Stephen P.
ebe5e699-553f-408b-ab9d-d20270e952c1
Greenacre, Victoria
c665a38b-0b1a-4671-ac75-bf0679dd1c57
Hector, Andrew L.
f19a8f31-b37f-4474-b32a-b7cf05b9f0e5
Levason, William
e7f6d7c7-643c-49f5-8b57-0ebbe1bb52cd
Reid, Gillian
37d35b11-40ce-48c5-a68e-f6ce04cd4037
De Groot, Cornelis
92cd2e02-fcc4-43da-8816-c86f966be90c
Huang, Ruomeng
c6187811-ef2f-4437-8333-595c0d6ac978

Newbrook, Daniel William, Richards, Stephen P., Greenacre, Victoria, Hector, Andrew L., Levason, William, Reid, Gillian, De Groot, Cornelis and Huang, Ruomeng (2020) Selective chemical vapor deposition approach for Sb2Te3 thin film micro-thermoelectric generators. ACS Applied Energy Materials, 3 (6), 5840-5846. (doi:10.1021/acsaem.0c00766).

Record type: Article

Abstract

Micro-thermoelectric generators are attractive for autonomous sensor systems. This work reports an approach for fabricating thin film micro-thermoelectric generators via selective chemical vapor deposition. The approach utilizes our single-source precursors, which enable the production of high-quality thermoelectric materials, as exemplified by Sb2Te3 in this work. It also allows great control over the thermoelectric properties of the as-deposited Sb2Te3 by simply varying the deposition temperature. A competitive power factor of 16.5 μW/(cm·K2) can be obtained for a Sb2Te3 film deposited at 364 °C, with the highest estimated ZT value of 0.65. The selective deposition over the conductive TiN surface enables the fabrication of a prototype single-leg thermoelectric generator, which produces a maximum power of 0.27 nW, with a temperature gradient of only 0.11 K while reducing 87% of tellurium consumption.

Text
TE-SbTe paper submit to ACS AEM revised - Accepted Manuscript
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More information

Accepted/In Press date: 6 May 2020
e-pub ahead of print date: 6 May 2020
Published date: 22 June 2020
Keywords: Sb Te, micro-thermoelectric generator, selective chemical vapor deposition, single-source precursor, thin film

Identifiers

Local EPrints ID: 441668
URI: http://eprints.soton.ac.uk/id/eprint/441668
ISSN: 2574-0962
PURE UUID: ed7cfe76-7a6d-4ae4-a956-1f79b23a3172
ORCID for Daniel William Newbrook: ORCID iD orcid.org/0000-0002-5047-6168
ORCID for Andrew L. Hector: ORCID iD orcid.org/0000-0002-9964-2163
ORCID for William Levason: ORCID iD orcid.org/0000-0003-3540-0971
ORCID for Gillian Reid: ORCID iD orcid.org/0000-0001-5349-3468
ORCID for Cornelis De Groot: ORCID iD orcid.org/0000-0002-3850-7101

Catalogue record

Date deposited: 23 Jun 2020 16:55
Last modified: 15 Sep 2021 04:14

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