Vertical directional coupler network using a-Si slope waveguides
Vertical directional coupler network using a-Si slope waveguides
A CMOS compatible three-dimensional (3D) integrated photonics circuit for multilayer silicon photonics is reported. Slopes with angles between 10° and 15° were created in the oxide layer using single step wet etching to connect the two Si waveguide layers. Amorphous Si (a-Si) deposited using hot wire chemical vapor deposition (HWCVD) at a temperature of 230°C was used to fabricate the device. Losses of 0.5 dB/slope were measured in the slope waveguides at 1310 nm wavelength. As a demonstration, we propose a 4x4 network switch using a-Si based vertical directional coupler.
Mittal, V.
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Petra, R.
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Tarazona, A.
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Dinsdale, N.J.
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Khokhar, A.
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Banakar, M.
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Thomson, D.
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Musken, O.L.
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Reed, G.T.
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Chong, H.M.H.
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Rubinsztein-Dunlop, Halina
30 December 2019
Mittal, V.
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Petra, R.
578011d0-6b70-412e-abb7-d04acce3ac4a
Tarazona, A.
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Dinsdale, N.J.
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Khokhar, A.
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Banakar, M.
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Thomson, D.
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Musken, O.L.
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Reed, G.T.
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Chong, H.M.H.
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Rubinsztein-Dunlop, Halina
Mittal, V., Petra, R., Tarazona, A., Dinsdale, N.J., Khokhar, A., Banakar, M., Thomson, D., Musken, O.L., Reed, G.T. and Chong, H.M.H.
(2019)
Vertical directional coupler network using a-Si slope waveguides.
Mitchell, Arnan and Rubinsztein-Dunlop, Halina
(eds.)
In Proceedings Volume 1120: AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019.
vol. 1120,
SPIE.
2 pp
.
(doi:10.1117/12.2542213).
Record type:
Conference or Workshop Item
(Paper)
Abstract
A CMOS compatible three-dimensional (3D) integrated photonics circuit for multilayer silicon photonics is reported. Slopes with angles between 10° and 15° were created in the oxide layer using single step wet etching to connect the two Si waveguide layers. Amorphous Si (a-Si) deposited using hot wire chemical vapor deposition (HWCVD) at a temperature of 230°C was used to fabricate the device. Losses of 0.5 dB/slope were measured in the slope waveguides at 1310 nm wavelength. As a demonstration, we propose a 4x4 network switch using a-Si based vertical directional coupler.
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More information
Published date: 30 December 2019
Venue - Dates:
Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019, , Melbourne, Australia, 2019-12-08 - 2019-12-12
Identifiers
Local EPrints ID: 441937
URI: http://eprints.soton.ac.uk/id/eprint/441937
PURE UUID: cdf76265-9e89-46f1-948d-d0db07f33146
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Date deposited: 02 Jul 2020 16:35
Last modified: 18 Mar 2024 03:13
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Contributors
Author:
V. Mittal
Author:
R. Petra
Author:
A. Tarazona
Author:
N.J. Dinsdale
Author:
A. Khokhar
Author:
H.M.H. Chong
Editor:
Arnan Mitchell
Editor:
Halina Rubinsztein-Dunlop
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