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Vertical directional coupler network using a-Si slope waveguides

Vertical directional coupler network using a-Si slope waveguides
Vertical directional coupler network using a-Si slope waveguides
A CMOS compatible three-dimensional (3D) integrated photonics circuit for multilayer silicon photonics is reported. Slopes with angles between 10° and 15° were created in the oxide layer using single step wet etching to connect the two Si waveguide layers. Amorphous Si (a-Si) deposited using hot wire chemical vapor deposition (HWCVD) at a temperature of 230°C was used to fabricate the device. Losses of 0.5 dB/slope were measured in the slope waveguides at 1310 nm wavelength. As a demonstration, we propose a 4x4 network switch using a-Si based vertical directional coupler.
Mittal, V.
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Petra, R.
578011d0-6b70-412e-abb7-d04acce3ac4a
Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Dinsdale, N.J.
4ec4aa55-6cce-43f7-9c35-cf8c16e8cf86
Khokhar, A.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Banakar, M.
2da59916-a7af-4cab-bc5b-bfe28e29d974
Thomson, D.
17c1626c-2422-42c6-98e0-586ae220bcda
Musken, O.L.
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Mittal, V.
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Petra, R.
578011d0-6b70-412e-abb7-d04acce3ac4a
Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Dinsdale, N.J.
4ec4aa55-6cce-43f7-9c35-cf8c16e8cf86
Khokhar, A.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Banakar, M.
2da59916-a7af-4cab-bc5b-bfe28e29d974
Thomson, D.
17c1626c-2422-42c6-98e0-586ae220bcda
Musken, O.L.
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1

Mittal, V., Petra, R., Tarazona, A., Dinsdale, N.J., Khokhar, A., Banakar, M., Thomson, D., Musken, O.L., Reed, G.T. and Chong, H.M.H. (2019) Vertical directional coupler network using a-Si slope waveguides. Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019. 08 - 12 Dec 2019. 2 pp . (doi:10.1117/12.2542213).

Record type: Conference or Workshop Item (Paper)

Abstract

A CMOS compatible three-dimensional (3D) integrated photonics circuit for multilayer silicon photonics is reported. Slopes with angles between 10° and 15° were created in the oxide layer using single step wet etching to connect the two Si waveguide layers. Amorphous Si (a-Si) deposited using hot wire chemical vapor deposition (HWCVD) at a temperature of 230°C was used to fabricate the device. Losses of 0.5 dB/slope were measured in the slope waveguides at 1310 nm wavelength. As a demonstration, we propose a 4x4 network switch using a-Si based vertical directional coupler.

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More information

Published date: 30 December 2019
Venue - Dates: Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019, 2019-12-08 - 2019-12-12

Identifiers

Local EPrints ID: 441937
URI: http://eprints.soton.ac.uk/id/eprint/441937
PURE UUID: cdf76265-9e89-46f1-948d-d0db07f33146
ORCID for V. Mittal: ORCID iD orcid.org/0000-0003-4836-5327
ORCID for N.J. Dinsdale: ORCID iD orcid.org/0000-0001-9870-5700
ORCID for O.L. Musken: ORCID iD orcid.org/0000-0003-0693-5504
ORCID for H.M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 02 Jul 2020 16:35
Last modified: 29 Jul 2020 01:47

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Contributors

Author: V. Mittal ORCID iD
Author: R. Petra
Author: A. Tarazona
Author: N.J. Dinsdale ORCID iD
Author: A. Khokhar
Author: M. Banakar
Author: D. Thomson
Author: O.L. Musken ORCID iD
Author: G.T. Reed
Author: H.M.H. Chong ORCID iD

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