The University of Southampton
×
Filter your search:
University of Southampton Institutional Repository

Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits

Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits
Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits
We use Ge ion implantation and electrical annealing, via TiN micro-heater, to trim silicon MZIs. The results show the possibility for switching the output power from the drop port to through port permanently, locally and rapidly.
IEEE
Yu, X.
bed336a3-2129-4995-b26c-9750bf5e5b0d
Chen, X.
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, M.M.
b28da945-84a5-4317-8896-6d9ea6a69589
Yan, X.
f003616b-ff81-4049-855c-bd19a227d169
Saito, S.
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Yu, X.
bed336a3-2129-4995-b26c-9750bf5e5b0d
Chen, X.
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, M.M.
b28da945-84a5-4317-8896-6d9ea6a69589
Yan, X.
f003616b-ff81-4049-855c-bd19a227d169
Saito, S.
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139

Yu, X., Chen, X., Milošević, M.M., Yan, X., Saito, S. and Reed, G.T. (2019) Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits. In 2019 IEEE 16th International Conference on Group IV Photonics (GFP). IEEE. 2 pp . (doi:10.1109/GROUP4.2019.8926046).

Record type: Conference or Workshop Item (Paper)

Abstract

We use Ge ion implantation and electrical annealing, via TiN micro-heater, to trim silicon MZIs. The results show the possibility for switching the output power from the drop port to through port permanently, locally and rapidly.

This record has no associated files available for download.

More information

Published date: August 2019
Venue - Dates: IEEE 16th International Conference on Group IV Photonics (GFP 2019), Singapore, 2019-08-28 - 2019-08-30
Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Sustainable Electronic Technologies research

Identifiers

Local EPrints ID: 442126
URI: http://eprints.soton.ac.uk/id/eprint/442126
DOI: doi:10.1109/GROUP4.2019.8926046
PURE UUID: b533b2a7-c530-44cd-9ee7-351492f7fac0
ORCID for X. Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for S. Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 07 Jul 2020 16:49
Last modified: 17 Mar 2024 03:29

Export record

Altmetrics

Contributors

Author: X. Yu
Author: X. Chen ORCID iD
Author: M.M. Milošević
Author: X. Yan
Author: S. Saito ORCID iD
Author: G.T. Reed

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Library staff additional information
Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×