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Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits

Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits
Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits
We use Ge ion implantation and electrical annealing, via TiN micro-heater, to trim silicon MZIs. The results show the possibility for switching the output power from the drop port to through port permanently, locally and rapidly.
IEEE
Chen, X.
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, M.M.
b28da945-84a5-4317-8896-6d9ea6a69589
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Saito, S.
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Yan, X.
f003616b-ff81-4049-855c-bd19a227d169
Yu, X.
bed336a3-2129-4995-b26c-9750bf5e5b0d
Chen, X.
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, M.M.
b28da945-84a5-4317-8896-6d9ea6a69589
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Saito, S.
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Yan, X.
f003616b-ff81-4049-855c-bd19a227d169
Yu, X.
bed336a3-2129-4995-b26c-9750bf5e5b0d

Chen, X., Milošević, M.M., Reed, G.T., Saito, S., Yan, X. and Yu, X. (2019) Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits. In 2019 IEEE 16th International Conference on Group IV Photonics (GFP). IEEE.. (doi:10.1109/GROUP4.2019.8926046).

Record type: Conference or Workshop Item (Paper)

Abstract

We use Ge ion implantation and electrical annealing, via TiN micro-heater, to trim silicon MZIs. The results show the possibility for switching the output power from the drop port to through port permanently, locally and rapidly.

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More information

Published date: 2019
Venue - Dates: IEEE 16th International Conference on Group IV Photonics (GFP 2019), Singapore, 2019-08-28 - 2019-08-30
Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Sustainable Electronic Technologies research

Identifiers

Local EPrints ID: 442126
URI: http://eprints.soton.ac.uk/id/eprint/442126
DOI: doi:10.1109/GROUP4.2019.8926046
PURE UUID: b533b2a7-c530-44cd-9ee7-351492f7fac0
ORCID for X. Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for S. Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 07 Jul 2020 16:49
Last modified: 28 Apr 2022 02:07

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Contributors

Author: X. Chen ORCID iD
Author: M.M. Milošević
Author: G.T. Reed
Author: S. Saito ORCID iD
Author: X. Yan
Author: X. Yu

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