Chen, X., Milošević, M.M., Reed, G.T., Saito, S., Yan, X. and Yu, X. (2019) Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits. In 2019 IEEE 16th International Conference on Group IV Photonics (GFP). IEEE.. (doi:10.1109/GROUP4.2019.8926046).
Abstract
We use Ge ion implantation and electrical annealing, via TiN micro-heater, to trim silicon MZIs. The results show the possibility for switching the output power from the drop port to through port permanently, locally and rapidly.
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- Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group > Photonic Systems Circuits and Sensors Group
Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group > Photonic Systems Circuits and Sensors Group - Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Sustainable Electronic Technologies
School of Electronics and Computer Science > Sustainable Electronic Technologies
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