Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits
Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits
We use Ge ion implantation and electrical annealing, via TiN micro-heater, to trim silicon MZIs. The results show the possibility for switching the output power from the drop port to through port permanently, locally and rapidly.
Chen, X.
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, M.M.
b28da945-84a5-4317-8896-6d9ea6a69589
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Saito, S.
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Yan, X.
f003616b-ff81-4049-855c-bd19a227d169
Yu, X.
bed336a3-2129-4995-b26c-9750bf5e5b0d
2019
Chen, X.
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, M.M.
b28da945-84a5-4317-8896-6d9ea6a69589
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Saito, S.
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Yan, X.
f003616b-ff81-4049-855c-bd19a227d169
Yu, X.
bed336a3-2129-4995-b26c-9750bf5e5b0d
Chen, X., Milošević, M.M., Reed, G.T., Saito, S., Yan, X. and Yu, X.
(2019)
Ion implantation and electrical annealing for trimming silicon MZIs and facilitating one-time programmable photonic circuits.
In 2019 IEEE 16th International Conference on Group IV Photonics (GFP).
IEEE..
(doi:10.1109/GROUP4.2019.8926046).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We use Ge ion implantation and electrical annealing, via TiN micro-heater, to trim silicon MZIs. The results show the possibility for switching the output power from the drop port to through port permanently, locally and rapidly.
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Published date: 2019
Venue - Dates:
IEEE 16th International Conference on Group IV Photonics (GFP 2019), Singapore, 2019-08-28 - 2019-08-30
Identifiers
Local EPrints ID: 442126
URI: http://eprints.soton.ac.uk/id/eprint/442126
PURE UUID: b533b2a7-c530-44cd-9ee7-351492f7fac0
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Date deposited: 07 Jul 2020 16:49
Last modified: 23 Feb 2023 02:59
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Contributors
Author:
X. Chen
Author:
M.M. Milošević
Author:
S. Saito
Author:
X. Yan
Author:
X. Yu
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