Laser writing with sub-nanosecond burst of femtosecond pulses using strain accumulation

Okhrimchuk, Andrey, Fedotov, Sergey, Glebov, Ivan, Sigaev, Vladimir and Kazansky, Peter (2017) Laser writing with sub-nanosecond burst of femtosecond pulses using strain accumulation. 2017 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), , Munich, Germany. 25 - 29 Jun 2017. 1 pp . (doi:10.1109/CLEOE-EQEC.2017.8087228).

Abstract

Femtosecond laser direct writing and micromachining attract considerable interest for a variety of applications ranging from integrated optics and microfluidics to printable flat optics and multi-dimensional optical data storage. A regular train of femtosecond pulses generated by femtosecond oscillator or regenerative amplifier does commonly used in laser material processing. Micromachining with sub-microsecond bursts of femtosecond pulses has been applied for morphology control of structures generated via accumulation and regulation of a heat deposition [1,2]. In addition to heating a pressure wave and rarefaction in the modified zone are important factors determining the laser induced structural changes [3]. However there is a lack of laser processing experiments with a burst exploiting accumulation of the rarefaction.

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