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Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light

Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light
Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light
Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high-resolution extreme ultraviolet (EUV) microscopy. Here, we demonstrate CDI reconstruction of a complex valued object under illumination by a compact gas-discharge EUV light source emitting at 17.3 nm (O VI spectral line). The image reconstruction method accounts for the partial spatial coherence of the radiation and allows imaging even with residual background light. These results are a first step towards laboratory-scale CDI with a gas-discharge light source for applications including mask inspection for EUV lithography, metrology and astronomy.
Bußmann, J.
c6b074c9-d11e-47a6-8669-2201124168d1
Odstrčil, M.
b297d3ec-ed42-4709-9f90-7af79d0644c7
Bresenitz, R.
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Rudolf, D.
1d77cfa9-0b29-45e2-a30f-185dee3f12a8
Miao, Jianwei
ad0364fc-5612-4050-b6ea-eedbb7b98f72
Brocklesby, W.S.
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Grützmacher, D.
72d75987-db01-4361-b6b6-4d8bc4864c5c
Juschkin, L.
9aab7dc5-7599-48e1-93f8-77ea7adf4687
Bußmann, J.
c6b074c9-d11e-47a6-8669-2201124168d1
Odstrčil, M.
b297d3ec-ed42-4709-9f90-7af79d0644c7
Bresenitz, R.
4e863a0d-16c5-4a48-80ff-dda1bfffd84f
Rudolf, D.
1d77cfa9-0b29-45e2-a30f-185dee3f12a8
Miao, Jianwei
ad0364fc-5612-4050-b6ea-eedbb7b98f72
Brocklesby, W.S.
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Grützmacher, D.
72d75987-db01-4361-b6b6-4d8bc4864c5c
Juschkin, L.
9aab7dc5-7599-48e1-93f8-77ea7adf4687

Bußmann, J., Odstrčil, M., Bresenitz, R., Rudolf, D., Miao, Jianwei, Brocklesby, W.S., Grützmacher, D. and Juschkin, L. (2015) Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light. Conference on X-Ray Lasers and Coherent X-Ray Sources - Development and Applications XI: SPIE 9589. 12 - 13 Aug 2015. 8 pp . (doi:10.1117/12.2187852).

Record type: Conference or Workshop Item (Paper)

Abstract

Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high-resolution extreme ultraviolet (EUV) microscopy. Here, we demonstrate CDI reconstruction of a complex valued object under illumination by a compact gas-discharge EUV light source emitting at 17.3 nm (O VI spectral line). The image reconstruction method accounts for the partial spatial coherence of the radiation and allows imaging even with residual background light. These results are a first step towards laboratory-scale CDI with a gas-discharge light source for applications including mask inspection for EUV lithography, metrology and astronomy.

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More information

Published date: 22 September 2015
Venue - Dates: Conference on X-Ray Lasers and Coherent X-Ray Sources - Development and Applications XI: SPIE 9589, 2015-08-12 - 2015-08-13

Identifiers

Local EPrints ID: 442400
URI: http://eprints.soton.ac.uk/id/eprint/442400
PURE UUID: 414b192b-ca15-4783-9832-dd5bdd7723d5
ORCID for W.S. Brocklesby: ORCID iD orcid.org/0000-0002-2123-6712

Catalogue record

Date deposited: 14 Jul 2020 16:38
Last modified: 29 Jul 2020 01:31

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Contributors

Author: J. Bußmann
Author: M. Odstrčil
Author: R. Bresenitz
Author: D. Rudolf
Author: Jianwei Miao
Author: W.S. Brocklesby ORCID iD
Author: D. Grützmacher
Author: L. Juschkin

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