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CMOS-compatible deposition of tunable crystalline SiGe composition on insulator

CMOS-compatible deposition of tunable crystalline SiGe composition on insulator
CMOS-compatible deposition of tunable crystalline SiGe composition on insulator
We report a new method of deposition for crystalline SiGe and Ge on insulator. The method enable to deposit multiple concentration of SiGe or pure Ge on insulator using one deposition process.
Gardes, F.Y.
7a49fc6d-dade-4099-b016-c60737cb5bb2
Littlejohns, C.G.
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Nedeljković, M.
b64e21c2-1b95-479d-a35c-3456dff8c796
Mashanovich, G.
c806e262-af80-4836-b96f-319425060051
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Gardes, F.Y.
7a49fc6d-dade-4099-b016-c60737cb5bb2
Littlejohns, C.G.
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Nedeljković, M.
b64e21c2-1b95-479d-a35c-3456dff8c796
Mashanovich, G.
c806e262-af80-4836-b96f-319425060051
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139

Gardes, F.Y., Littlejohns, C.G., Domínguez Bucio, Thalia, Nedeljković, M., Mashanovich, G. and Reed, G.T. (2016) CMOS-compatible deposition of tunable crystalline SiGe composition on insulator. Conference on Lasers and Electro-Optics 2016, , San Jose, United States. 05 - 10 Jun 2016. (doi:10.1364/CLEO_SI.2016.SF1P.3).

Record type: Conference or Workshop Item (Paper)

Abstract

We report a new method of deposition for crystalline SiGe and Ge on insulator. The method enable to deposit multiple concentration of SiGe or pure Ge on insulator using one deposition process.

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More information

Published date: 5 June 2016
Venue - Dates: Conference on Lasers and Electro-Optics 2016, , San Jose, United States, 2016-06-05 - 2016-06-10
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Identifiers

Local EPrints ID: 442477
URI: http://eprints.soton.ac.uk/id/eprint/442477
DOI: doi:10.1364/CLEO_SI.2016.SF1P.3
PURE UUID: e74b101a-c155-4b26-a443-b615dbabf7fe
ORCID for F.Y. Gardes: ORCID iD orcid.org/0000-0003-1400-3272
ORCID for Thalia Domínguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for M. Nedeljković: ORCID iD orcid.org/0000-0002-9170-7911
ORCID for G. Mashanovich: ORCID iD orcid.org/0000-0003-2954-5138

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Date deposited: 16 Jul 2020 16:30
Last modified: 29 Oct 2024 02:45

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Contributors

Author: F.Y. Gardes ORCID iD
Author: C.G. Littlejohns
Author: Thalia Domínguez Bucio ORCID iD
Author: M. Nedeljković ORCID iD
Author: G. Mashanovich ORCID iD
Author: G.T. Reed

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