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Developing an EUV multilayer adaptive mirror: the first results

Developing an EUV multilayer adaptive mirror: the first results
Developing an EUV multilayer adaptive mirror: the first results
The growing interest in the study of the extreme ultraviolet (EUV) radiation-matter interaction is feeding up the development of new technologies able to overcame some current technological limits. Adaptive optics is an established technology already widely used for wavefront correction in many applications such as astronomical telescopes, laser communications, high power laser systems, microscopy and high resolution imaging systems. Although this technology is already exploited in the EUV and X-ray range, its usage is only feasible in systems with a grazing incidence configuration. On the other hand, the development of a EUV normal incidence adaptive optics can open new interesting possibilities in many different fields ranging from free electron laser and synchrotron applications up to EUV photolithography. In this work we report the preliminary results achieved in the developing of a normal incidence EUV multilayered adaptive mirror tuned at 30.4nm. The proper functioning and potential applications of such device have been demonstrated by using a High order Harmonics Generation (HHG) source.
Corso, A.J.
4055fedc-c0d2-4347-97b0-81ae6bdb4002
Bonora, S.
88b3d7c0-db60-4682-af3a-f3d93bf35f2b
Zuppella, P.
c60b296b-3df5-4c1a-b001-64d3a7637426
Baksh, P.
578fea83-9a1c-4dd0-b3f6-66f5552f2344
Miszczak, M.
7aeee058-080d-498a-9833-37a0dd8c60b0
Brocklesby, W.S.
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Zhanshan, W.
e5a6d65c-8430-4125-89a6-8f19a497588c
Nicolosi, P.
e2b386d1-73bf-45f2-b166-6afb9f217ff0
Pelizzo, M.G.
112cb688-f8b7-409c-aee7-d6029d33ed72
Corso, A.J.
4055fedc-c0d2-4347-97b0-81ae6bdb4002
Bonora, S.
88b3d7c0-db60-4682-af3a-f3d93bf35f2b
Zuppella, P.
c60b296b-3df5-4c1a-b001-64d3a7637426
Baksh, P.
578fea83-9a1c-4dd0-b3f6-66f5552f2344
Miszczak, M.
7aeee058-080d-498a-9833-37a0dd8c60b0
Brocklesby, W.S.
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Zhanshan, W.
e5a6d65c-8430-4125-89a6-8f19a497588c
Nicolosi, P.
e2b386d1-73bf-45f2-b166-6afb9f217ff0
Pelizzo, M.G.
112cb688-f8b7-409c-aee7-d6029d33ed72

Corso, A.J., Bonora, S., Zuppella, P., Baksh, P., Miszczak, M., Brocklesby, W.S., Zhanshan, W., Nicolosi, P. and Pelizzo, M.G. (2016) Developing an EUV multilayer adaptive mirror: the first results. Conference on Advances in X-Ray/EUV Optics and Components XI : (held as part of the SPIE International Symposium on Optics + Photonics). 31 Aug - 01 Sep 2016. 7 pp . (doi:10.1117/12.2238541).

Record type: Conference or Workshop Item (Paper)

Abstract

The growing interest in the study of the extreme ultraviolet (EUV) radiation-matter interaction is feeding up the development of new technologies able to overcame some current technological limits. Adaptive optics is an established technology already widely used for wavefront correction in many applications such as astronomical telescopes, laser communications, high power laser systems, microscopy and high resolution imaging systems. Although this technology is already exploited in the EUV and X-ray range, its usage is only feasible in systems with a grazing incidence configuration. On the other hand, the development of a EUV normal incidence adaptive optics can open new interesting possibilities in many different fields ranging from free electron laser and synchrotron applications up to EUV photolithography. In this work we report the preliminary results achieved in the developing of a normal incidence EUV multilayered adaptive mirror tuned at 30.4nm. The proper functioning and potential applications of such device have been demonstrated by using a High order Harmonics Generation (HHG) source.

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More information

Published date: 15 September 2016
Venue - Dates: Conference on Advances in X-Ray/EUV Optics and Components XI : (held as part of the SPIE International Symposium on Optics + Photonics), 2016-08-31 - 2016-09-01

Identifiers

Local EPrints ID: 442482
URI: http://eprints.soton.ac.uk/id/eprint/442482
PURE UUID: 3b3e4aef-ff81-45ee-aae4-e0f0a11d550a
ORCID for W.S. Brocklesby: ORCID iD orcid.org/0000-0002-2123-6712

Catalogue record

Date deposited: 16 Jul 2020 16:30
Last modified: 29 Jul 2020 01:31

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