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Ion implantation in silicon for photonic device trimming

Ion implantation in silicon for photonic device trimming
Ion implantation in silicon for photonic device trimming
We implemented germanium ion implantation based refractive index change in integrated photonics devices for device trimming. Partial annealing of the ion implanted section revealed the possibility to permanently adjust the resonant wavelength peak position to a target wavelength.
IEEE
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Cao, Wei
6194b5dd-d4e9-40d0-b5fb-b264d72fe594
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Littlejohns, Callum G.
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Wang, Hong
dfd0ec4f-682a-4596-a0d1-171313cc5733
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Cao, Wei
6194b5dd-d4e9-40d0-b5fb-b264d72fe594
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Littlejohns, Callum G.
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Wang, Hong
dfd0ec4f-682a-4596-a0d1-171313cc5733

Milošević, Milan M., Chen, Xia, Cao, Wei, Thomson, David J., Reed, Graham T., Littlejohns, Callum G. and Wang, Hong (2017) Ion implantation in silicon for photonic device trimming. In 2017 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR). IEEE.. (doi:10.1109/CLEOPR.2017.8118916).

Record type: Conference or Workshop Item (Paper)

Abstract

We implemented germanium ion implantation based refractive index change in integrated photonics devices for device trimming. Partial annealing of the ion implanted section revealed the possibility to permanently adjust the resonant wavelength peak position to a target wavelength.

Full text not available from this repository.

More information

Published date: 2017
Venue - Dates: CLEO-Pacific Rim 2017, Singapore, 2017-07-31 - 2017-08-04

Identifiers

Local EPrints ID: 442519
URI: http://eprints.soton.ac.uk/id/eprint/442519
PURE UUID: 4c0de4b4-1c60-4fe6-aa54-b0829cdb3ccd
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Wei Cao: ORCID iD orcid.org/0000-0003-1431-7060

Catalogue record

Date deposited: 17 Jul 2020 16:31
Last modified: 07 Oct 2020 03:43

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