Anantha, P., Zhang, Lin, Li, Wei, Guo, Xin, Qiu, Haodong, Chong, Gang Yih, Littlejohns, Callum G., Nedeljković, Milos, Soler Penadés, Jordi, Mashanovich, Goran Z., Wang, Hong and Tan, Chuan Seng (2017) Low propagation loss Ge-on-Si waveguides and their dependency on processing methods. In 2017 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR). IEEE.. (doi:10.1109/CLEOPR.2017.8118738).
Abstract
The successful fabrication of MIR Ge-on-Si waveguides written by both the high-resolution electron beam lithography (EBL) approach, as well as the wafer scale, high throughput approach using 365 nm i-line stepper lithography is reported. A low propagation loss of ~2.7 dB/cm at a wavelength of 3.8 µm is shown for Ge-on-Si waveguides patterned using the i-line stepper. The waveguide etching technique, using reactive ion or deep-reactive ion etching, is also analyzed. Furthermore, the propagation loss values for both the lithographic techniques are found to be comparable. Therefore the advantage of using a simpler i-line stepper lithography for high volume fabrication is highlighted.
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- Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg) > Photonic Systems Circuits & Sensors (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Photonic Systems Circuits & Sensors (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Photonic Systems Circuits & Sensors (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Optoelectronics Research Centre (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
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