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Raw data for Integration of low loss vertical slot waveguides on SOI photonic platforms for high efficiency carrier accumulation modulators

Raw data for Integration of low loss vertical slot waveguides on SOI photonic platforms for high efficiency carrier accumulation modulators
Raw data for Integration of low loss vertical slot waveguides on SOI photonic platforms for high efficiency carrier accumulation modulators
This dataset supports the publication: Zhang, W. et al (2020). Integration of low loss vertical slot waveguides on SOI photonic platforms for high efficiency carrier accumulation modulators. Optics Express 28(16). Silicon accumulation type modulators offer prospects of high power efficiency, large bandwidth and high voltage phase linearity making them promising candidates for a number of advanced electro-optic applications. A significant challenge in the realisation of such a modulator is the fabrication of the passive waveguide structure which requires a thin dielectric layer to be positioned within the waveguide, i.e. slotted waveguides. Simultaneously, the fabricated slotted waveguide should be integrated with conventional rib waveguides with negligible optical transition losses. Here, successful integration of polysilicon and silicon slot waveguides enabling a low propagation loss 0.4-1.2 dB/mm together with an ultra-small optical mode conversion loss 0.04 dB between rib and slot waveguides is demonstrated. These fabricated slot waveguide with dielectric thermal SiO2 layers thicknesses around 6 nm, 8 nm and 10 nm have been characterized under transmission electron microscopy allowing for strong carrier accumulation effects for MOS-capacitor electro-optic modulators.
University of Southampton
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Ebert, Martin
1a8f1756-d724-4b44-8504-c01f8dc7aa50
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Reynolds, Jamie Dean
96faa744-02ee-458c-8e48-953ea9e54afe
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Du, Han
f68d2391-e6fb-4fbc-bbe0-86ce9a871352
Banakar, Mehdi
ad56fc0a-728c-4abb-8be5-74318bb2758e
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Littlejohns, Callum
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Ebert, Martin
1a8f1756-d724-4b44-8504-c01f8dc7aa50
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Reynolds, Jamie Dean
96faa744-02ee-458c-8e48-953ea9e54afe
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Du, Han
f68d2391-e6fb-4fbc-bbe0-86ce9a871352
Banakar, Mehdi
ad56fc0a-728c-4abb-8be5-74318bb2758e
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Littlejohns, Callum
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda

Zhang, Weiwei, Ebert, Martin, Chen, Bigeng, Reynolds, Jamie Dean, Yan, Xingzhao, Du, Han, Banakar, Mehdi, Debnath, Kapil, Littlejohns, Callum, Saito, Shinichi and Thomson, David (2020) Raw data for Integration of low loss vertical slot waveguides on SOI photonic platforms for high efficiency carrier accumulation modulators. University of Southampton doi:10.5258/SOTON/D1340 [Dataset]

Record type: Dataset

Abstract

This dataset supports the publication: Zhang, W. et al (2020). Integration of low loss vertical slot waveguides on SOI photonic platforms for high efficiency carrier accumulation modulators. Optics Express 28(16). Silicon accumulation type modulators offer prospects of high power efficiency, large bandwidth and high voltage phase linearity making them promising candidates for a number of advanced electro-optic applications. A significant challenge in the realisation of such a modulator is the fabrication of the passive waveguide structure which requires a thin dielectric layer to be positioned within the waveguide, i.e. slotted waveguides. Simultaneously, the fabricated slotted waveguide should be integrated with conventional rib waveguides with negligible optical transition losses. Here, successful integration of polysilicon and silicon slot waveguides enabling a low propagation loss 0.4-1.2 dB/mm together with an ultra-small optical mode conversion loss 0.04 dB between rib and slot waveguides is demonstrated. These fabricated slot waveguide with dielectric thermal SiO2 layers thicknesses around 6 nm, 8 nm and 10 nm have been characterized under transmission electron microscopy allowing for strong carrier accumulation effects for MOS-capacitor electro-optic modulators.

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More information

Published date: 31 August 2020

Identifiers

Local EPrints ID: 444098
URI: http://eprints.soton.ac.uk/id/eprint/444098
PURE UUID: 80c07136-56d3-44c4-aebc-68f1aaf6442f
ORCID for Bigeng Chen: ORCID iD orcid.org/0000-0003-4925-2308
ORCID for Jamie Dean Reynolds: ORCID iD orcid.org/0000-0002-0072-0134
ORCID for Shinichi Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 24 Sep 2020 16:44
Last modified: 25 Sep 2020 01:44

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Contributors

Creator: Weiwei Zhang
Creator: Martin Ebert
Creator: Bigeng Chen ORCID iD
Creator: Jamie Dean Reynolds ORCID iD
Creator: Xingzhao Yan
Creator: Han Du
Creator: Mehdi Banakar
Creator: Kapil Debnath
Creator: Shinichi Saito ORCID iD
Creator: David Thomson

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