The University of Southampton
University of Southampton Institutional Repository

Laser processed semiconductors for integrated photonic devices

Laser processed semiconductors for integrated photonic devices
Laser processed semiconductors for integrated photonic devices
We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
MacFarquhar, Stuart James
cff30fb5-a4b6-44ab-b1b3-138e7020fba3
Franz, Yohann
023ff50d-4172-4d4f-9a20-bb365820fb5d
Runge, Antoine
24fd1d59-5328-4201-8eb3-172f237563fa
Mailis, Sakellaris
9fcc2cc8-9c00-452e-b785-a20263cfb33b
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Aktaş, Ozan
2e90db41-f409-431f-9827-2e2577a52457
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
MacFarquhar, Stuart James
cff30fb5-a4b6-44ab-b1b3-138e7020fba3
Franz, Yohann
023ff50d-4172-4d4f-9a20-bb365820fb5d
Runge, Antoine
24fd1d59-5328-4201-8eb3-172f237563fa
Mailis, Sakellaris
9fcc2cc8-9c00-452e-b785-a20263cfb33b
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Aktaş, Ozan
2e90db41-f409-431f-9827-2e2577a52457

Peacock, Anna, MacFarquhar, Stuart James, Franz, Yohann, Runge, Antoine, Mailis, Sakellaris, Oo, Swe, Mittal, Vinita, Chong, Harold and Aktaş, Ozan (2020) Laser processed semiconductors for integrated photonic devices. European Optical Society Annual Meeting 2020, , Porto, Portugal. 07 - 11 Sep 2020.

Record type: Conference or Workshop Item (Paper)

Abstract

We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.

Text
Laser_written_waveguides_ACP_invited - Accepted Manuscript
Available under License Creative Commons Attribution.
Download (182kB)

More information

Published date: 7 September 2020
Venue - Dates: European Optical Society Annual Meeting 2020, , Porto, Portugal, 2020-09-07 - 2020-09-11

Identifiers

Local EPrints ID: 444303
URI: http://eprints.soton.ac.uk/id/eprint/444303
PURE UUID: 6f3dc4e3-31b5-4782-9c39-87effda0293c
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172
ORCID for Stuart James MacFarquhar: ORCID iD orcid.org/0000-0002-4378-7670
ORCID for Vinita Mittal: ORCID iD orcid.org/0000-0003-4836-5327
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Ozan Aktaş: ORCID iD orcid.org/0000-0002-2255-7761

Catalogue record

Date deposited: 12 Oct 2020 16:30
Last modified: 18 Feb 2021 17:31

Export record

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×