Laser processed semiconductors for integrated photonic devices
Laser processed semiconductors for integrated photonic devices
We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.
Peacock, Anna
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MacFarquhar, Stuart James
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Franz, Yohann
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Runge, Antoine
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Mailis, Sakellaris
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Oo, Swe
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Mittal, Vinita
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Chong, Harold
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Aktaş, Ozan
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7 September 2020
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
MacFarquhar, Stuart James
cff30fb5-a4b6-44ab-b1b3-138e7020fba3
Franz, Yohann
023ff50d-4172-4d4f-9a20-bb365820fb5d
Runge, Antoine
24fd1d59-5328-4201-8eb3-172f237563fa
Mailis, Sakellaris
9fcc2cc8-9c00-452e-b785-a20263cfb33b
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Aktaş, Ozan
2e90db41-f409-431f-9827-2e2577a52457
Peacock, Anna, MacFarquhar, Stuart James, Franz, Yohann, Runge, Antoine, Mailis, Sakellaris, Oo, Swe, Mittal, Vinita, Chong, Harold and Aktaş, Ozan
(2020)
Laser processed semiconductors for integrated photonic devices.
European Optical Society Annual Meeting 2020, , Porto, Portugal.
07 - 11 Sep 2020.
Record type:
Conference or Workshop Item
(Paper)
Abstract
We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.
Text
Laser_written_waveguides_ACP_invited
- Accepted Manuscript
More information
Published date: 7 September 2020
Venue - Dates:
European Optical Society Annual Meeting 2020, , Porto, Portugal, 2020-09-07 - 2020-09-11
Identifiers
Local EPrints ID: 444303
URI: http://eprints.soton.ac.uk/id/eprint/444303
PURE UUID: 6f3dc4e3-31b5-4782-9c39-87effda0293c
Catalogue record
Date deposited: 12 Oct 2020 16:30
Last modified: 13 Dec 2021 03:21
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Contributors
Author:
Stuart James MacFarquhar
Author:
Antoine Runge
Author:
Sakellaris Mailis
Author:
Swe Oo
Author:
Vinita Mittal
Author:
Harold Chong
Author:
Ozan Aktaş
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