Peacock, Anna, MacFarquhar, Stuart James, Franz, Yohann, Runge, Antoine, Mailis, Sakellaris, Oo, Swe, Mittal, Vinita, Chong, Harold and Aktaş, Ozan (2020) Laser processed semiconductors for integrated photonic devices. European Optical Society Annual Meeting 2020, , Porto, Portugal. 07 - 11 Sep 2020.
Abstract
We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.
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- Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Fibre and Systems Group
Zepler Institute for Photonics and Nanoelectronics > Fibre and Systems Group - Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group > Photonic Systems Circuits and Sensors Group
Zepler Institute for Photonics and Nanoelectronics > Nanophotonics Group > Photonic Systems Circuits and Sensors Group - Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics
Zepler Institute for Photonics and Nanoelectronics - Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Sustainable Electronic Technologies
School of Electronics and Computer Science > Sustainable Electronic Technologies
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