The University of Southampton
University of Southampton Institutional Repository

Comparative study of DC and RF sputtered MoSe22 coatings containing carbon - An approach to optimize 3 stoichiometry, microstructure, crystallinity and 4 hardness

Comparative study of DC and RF sputtered MoSe22 coatings containing carbon - An approach to optimize 3 stoichiometry, microstructure, crystallinity and 4 hardness
Comparative study of DC and RF sputtered MoSe22 coatings containing carbon - An approach to optimize 3 stoichiometry, microstructure, crystallinity and 4 hardness
Low stoichiometry, low crystallinity, low hardness and incongruencies about the reported microstructure have limited the applicability of TMD-C (Transition metal dichalcogenides with carbon) solid-lubricant coatings. In this work, optimized Mo-Se-C coatings were deposited using confocal plasma magnetron sputtering to overcome the above-mentioned issues. Two different approaches were used; MoSe2 target powered by DC (direct current) or RF (radio frequency) magnetron sputtering. Carbon was always added by DC magnetron sputtering. Wavelength dispersive spectroscopy displayed Se/Mo stoichiometry of ~2, values higher than the literature. The Se/Mo ratio for RF-deposited coatings was lower than the DC ones. Scanning electron microscopy showed that irrespective of the low carbon additions, the Mo-Se-C coatings were highly compact with no vestiges of columnar growth due to optimal bombardment of sputtered species. Application of substrate bias further improved the compactness at the expense of lower Se/Mo ratio. X-ray diffraction, transmission electron microscopy and Raman spectroscopy confirmed the presence of MoSe2 crystals, and (002) basal planes. Even very low carbon additions led to an improvement of the hardness of the coatings. The work reports a comparison between RF and DC sputtering of MoSe2 coatings with carbon and provides a guideline to optimize the composition, morphology, structure and mechanical properties
transition metal dichalcogenides;, optimized;, stoichiometry;, crystallinity, microstructure, magnetron sputtering
2079-6412
Bin Yaqub, Talha
e63a18a0-010c-4fef-a40e-67d267ae7fbd
Vuchkov, Todor
606d002d-795b-445f-9e55-0f5cd658cad9
Sanguino, Pedro
1e61ec3d-45c2-4bad-884d-d1885276df45
Polcar, Tomas
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Cavaleiro, Albano
83fb0417-34af-4c14-b4b4-b9541e4fc652
Bin Yaqub, Talha
e63a18a0-010c-4fef-a40e-67d267ae7fbd
Vuchkov, Todor
606d002d-795b-445f-9e55-0f5cd658cad9
Sanguino, Pedro
1e61ec3d-45c2-4bad-884d-d1885276df45
Polcar, Tomas
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Cavaleiro, Albano
83fb0417-34af-4c14-b4b4-b9541e4fc652

Bin Yaqub, Talha, Vuchkov, Todor, Sanguino, Pedro, Polcar, Tomas and Cavaleiro, Albano (2020) Comparative study of DC and RF sputtered MoSe22 coatings containing carbon - An approach to optimize 3 stoichiometry, microstructure, crystallinity and 4 hardness. Coatings, 10 (2), [133]. (doi:10.3390/coatings10020133).

Record type: Article

Abstract

Low stoichiometry, low crystallinity, low hardness and incongruencies about the reported microstructure have limited the applicability of TMD-C (Transition metal dichalcogenides with carbon) solid-lubricant coatings. In this work, optimized Mo-Se-C coatings were deposited using confocal plasma magnetron sputtering to overcome the above-mentioned issues. Two different approaches were used; MoSe2 target powered by DC (direct current) or RF (radio frequency) magnetron sputtering. Carbon was always added by DC magnetron sputtering. Wavelength dispersive spectroscopy displayed Se/Mo stoichiometry of ~2, values higher than the literature. The Se/Mo ratio for RF-deposited coatings was lower than the DC ones. Scanning electron microscopy showed that irrespective of the low carbon additions, the Mo-Se-C coatings were highly compact with no vestiges of columnar growth due to optimal bombardment of sputtered species. Application of substrate bias further improved the compactness at the expense of lower Se/Mo ratio. X-ray diffraction, transmission electron microscopy and Raman spectroscopy confirmed the presence of MoSe2 crystals, and (002) basal planes. Even very low carbon additions led to an improvement of the hardness of the coatings. The work reports a comparison between RF and DC sputtering of MoSe2 coatings with carbon and provides a guideline to optimize the composition, morphology, structure and mechanical properties

Text
manuscript coparative study dc and rf mosec-final version - Accepted Manuscript
Restricted to Repository staff only
Available under License Creative Commons Attribution.
Request a copy
Text
coatings-10-00133-v2 - Version of Record
Available under License Creative Commons Attribution.
Download (4MB)

More information

Accepted/In Press date: 1 February 2020
Published date: 3 February 2020
Keywords: transition metal dichalcogenides;, optimized;, stoichiometry;, crystallinity, microstructure, magnetron sputtering

Identifiers

Local EPrints ID: 444761
URI: http://eprints.soton.ac.uk/id/eprint/444761
ISSN: 2079-6412
PURE UUID: c1904c5f-a189-4b8c-8073-f00fd35be6a6
ORCID for Tomas Polcar: ORCID iD orcid.org/0000-0002-0863-6287

Catalogue record

Date deposited: 04 Nov 2020 17:30
Last modified: 28 Apr 2022 02:05

Export record

Altmetrics

Contributors

Author: Talha Bin Yaqub
Author: Todor Vuchkov
Author: Pedro Sanguino
Author: Tomas Polcar ORCID iD
Author: Albano Cavaleiro

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×