The University of Southampton
University of Southampton Institutional Repository

CORNERSTONE’s silicon photonics rapid prototyping platforms: current status and future outlook

CORNERSTONE’s silicon photonics rapid prototyping platforms: current status and future outlook
CORNERSTONE’s silicon photonics rapid prototyping platforms: current status and future outlook
The field of silicon photonics has experienced widespread adoption in the datacoms industry over the past decade, with a plethora of other applications emerging more recently such as light detection and ranging (LIDAR), sensing, quantum photonics, programmable photonics and artificial intelligence. As a result of this, many commercial complementary metal oxide semiconductor (CMOS) foundries have developed open access silicon photonics process lines, enabling the mass production of silicon photonics systems. On the other side of the spectrum, several research labs, typically within universities, have opened up their facilities for small scale prototyping, commonly exploiting e-beam lithography for wafer patterning. Within this ecosystem, there remains a challenge for early stage researchers to progress their novel and innovate designs from the research lab to the commercial foundries because of the lack of compatibility of the processing technologies (e-beam lithography is not an industry tool). The CORNERSTONE rapid-prototyping capability bridges this gap between research and industry by providing a rapid prototyping fabrication line based on deep-UV lithography to enable seamless scaling up of production volumes, whilst also retaining the ability for device level innovation, crucial for researchers, by offering flexibility in its process flows. This review article presents a summary of the current CORNERSTONE capabilities and an outlook for the future.
Fabrication, Foundry, Germanium-on-silicon, Integration, MEMS, Mid-infrared, Modulators, Multi-project-wafer, Rapid prototyping, Silicon nitride, Silicon photonics, Silicon-on-insulator, Suspended silicon, Waveguides
2076-3417
1-34
Littlejohns, Callum
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Rowe, David
a0e0fe82-5e29-42b8-b370-5236a722f015
Du, Han
f68d2391-e6fb-4fbc-bbe0-86ce9a871352
Li, Ke
dd788ca7-0a39-4364-b4b8-65f0bb93340f
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Cao, Wei
5202fa2b-a471-45d4-84e9-9104dffdbbfc
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Banakar, Mehdi
ad56fc0a-728c-4abb-8be5-74318bb2758e
Tran, Denh
65bcfeb7-1864-4ad8-bdf3-71bd30006610
Liu, Shenghao
5b0ec29e-0ddb-4e08-950b-ba6adb1d01ed
Meng, Fanfan
9b5e8c83-a510-4eb0-87ff-c768345ba07d
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Qi, Yanli
20e83362-aa61-4f8c-81a2-0b416ecdee4e
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Nedeljković, Miloš
b64e21c2-1b95-479d-a35c-3456dff8c796
Mastronardi, Lorenzo
ea0aef76-de7e-4bdc-85be-1dc62dbf7802
Maharjan, Rijan
74350563-4a8c-4bda-be70-04eb4bfe3127
Bohora, Sanket
2f7054f0-c505-4d03-bb25-fd12670a5f1b
Dhakal, Ashim
1537fa3d-9bd0-43c3-b6a7-ebbb5383cafe
Crowe, Iain
0d095a64-75a3-43eb-a686-ab15135d8861
Khurana, Ankur
fa6bf47e-83cd-4475-8c85-d625fb97d50b
Balram, Krishna
9fcedc4a-cc65-4e7c-8cef-934fea16f00f
Zagaglia, Luca
4e7248e7-035d-4b55-8855-d4516b5b2e2a
Floris, Francesco
ac75eb40-d604-4f16-9d47-6b0302a90fc0
O'Brien, Peter
47945217-6e19-446d-ad1a-9ea452c65554
Di Gaetano, Eugenio
3b776bb2-b5ca-412f-8918-38204b980e6a
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Sorel, Marc
ae1b7c30-3456-45ee-8e86-0bf2a15cd698
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Littlejohns, Callum
d2837f04-0a83-4bf9-acb2-618aa42a0cad
Rowe, David
a0e0fe82-5e29-42b8-b370-5236a722f015
Du, Han
f68d2391-e6fb-4fbc-bbe0-86ce9a871352
Li, Ke
dd788ca7-0a39-4364-b4b8-65f0bb93340f
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Cao, Wei
5202fa2b-a471-45d4-84e9-9104dffdbbfc
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Banakar, Mehdi
ad56fc0a-728c-4abb-8be5-74318bb2758e
Tran, Denh
65bcfeb7-1864-4ad8-bdf3-71bd30006610
Liu, Shenghao
5b0ec29e-0ddb-4e08-950b-ba6adb1d01ed
Meng, Fanfan
9b5e8c83-a510-4eb0-87ff-c768345ba07d
Chen, Bigeng
e533448b-095e-4a9f-924c-301f4aa3007b
Qi, Yanli
20e83362-aa61-4f8c-81a2-0b416ecdee4e
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Nedeljković, Miloš
b64e21c2-1b95-479d-a35c-3456dff8c796
Mastronardi, Lorenzo
ea0aef76-de7e-4bdc-85be-1dc62dbf7802
Maharjan, Rijan
74350563-4a8c-4bda-be70-04eb4bfe3127
Bohora, Sanket
2f7054f0-c505-4d03-bb25-fd12670a5f1b
Dhakal, Ashim
1537fa3d-9bd0-43c3-b6a7-ebbb5383cafe
Crowe, Iain
0d095a64-75a3-43eb-a686-ab15135d8861
Khurana, Ankur
fa6bf47e-83cd-4475-8c85-d625fb97d50b
Balram, Krishna
9fcedc4a-cc65-4e7c-8cef-934fea16f00f
Zagaglia, Luca
4e7248e7-035d-4b55-8855-d4516b5b2e2a
Floris, Francesco
ac75eb40-d604-4f16-9d47-6b0302a90fc0
O'Brien, Peter
47945217-6e19-446d-ad1a-9ea452c65554
Di Gaetano, Eugenio
3b776bb2-b5ca-412f-8918-38204b980e6a
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Sorel, Marc
ae1b7c30-3456-45ee-8e86-0bf2a15cd698
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139

Littlejohns, Callum, Rowe, David, Du, Han, Li, Ke, Zhang, Weiwei, Cao, Wei, Domínguez Bucio, Thalia, Yan, Xingzhao, Banakar, Mehdi, Tran, Denh, Liu, Shenghao, Meng, Fanfan, Chen, Bigeng, Qi, Yanli, Chen, Xia, Nedeljković, Miloš, Mastronardi, Lorenzo, Maharjan, Rijan, Bohora, Sanket, Dhakal, Ashim, Crowe, Iain, Khurana, Ankur, Balram, Krishna, Zagaglia, Luca, Floris, Francesco, O'Brien, Peter, Di Gaetano, Eugenio, Chong, Harold, Gardes, Frederic, Thomson, David, Mashanovich, Goran, Sorel, Marc and Reed, Graham (2020) CORNERSTONE’s silicon photonics rapid prototyping platforms: current status and future outlook. Applied Sciences, 10 (22), 1-34, [8201]. (doi:10.3390/app10228201).

Record type: Review

Abstract

The field of silicon photonics has experienced widespread adoption in the datacoms industry over the past decade, with a plethora of other applications emerging more recently such as light detection and ranging (LIDAR), sensing, quantum photonics, programmable photonics and artificial intelligence. As a result of this, many commercial complementary metal oxide semiconductor (CMOS) foundries have developed open access silicon photonics process lines, enabling the mass production of silicon photonics systems. On the other side of the spectrum, several research labs, typically within universities, have opened up their facilities for small scale prototyping, commonly exploiting e-beam lithography for wafer patterning. Within this ecosystem, there remains a challenge for early stage researchers to progress their novel and innovate designs from the research lab to the commercial foundries because of the lack of compatibility of the processing technologies (e-beam lithography is not an industry tool). The CORNERSTONE rapid-prototyping capability bridges this gap between research and industry by providing a rapid prototyping fabrication line based on deep-UV lithography to enable seamless scaling up of production volumes, whilst also retaining the ability for device level innovation, crucial for researchers, by offering flexibility in its process flows. This review article presents a summary of the current CORNERSTONE capabilities and an outlook for the future.

Text
CORNERSTONE’s silicon photonics rapid prototyping platforms: Current Status and Future Outlook - Version of Record
Available under License Creative Commons Attribution.
Download (1MB)

More information

Accepted/In Press date: 16 November 2020
e-pub ahead of print date: 19 November 2020
Keywords: Fabrication, Foundry, Germanium-on-silicon, Integration, MEMS, Mid-infrared, Modulators, Multi-project-wafer, Rapid prototyping, Silicon nitride, Silicon photonics, Silicon-on-insulator, Suspended silicon, Waveguides

Identifiers

Local EPrints ID: 445280
URI: http://eprints.soton.ac.uk/id/eprint/445280
ISSN: 2076-3417
PURE UUID: e7a8c56e-bf34-4313-bc0b-ac60e8ba8bd1
ORCID for David Rowe: ORCID iD orcid.org/0000-0002-1167-150X
ORCID for Thalia Domínguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for Bigeng Chen: ORCID iD orcid.org/0000-0003-4925-2308
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Miloš Nedeljković: ORCID iD orcid.org/0000-0002-9170-7911
ORCID for Lorenzo Mastronardi: ORCID iD orcid.org/0000-0003-1489-2778
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 01 Dec 2020 17:30
Last modified: 04 Dec 2020 17:30

Export record

Altmetrics

Contributors

Author: David Rowe ORCID iD
Author: Han Du
Author: Ke Li
Author: Weiwei Zhang
Author: Wei Cao
Author: Xingzhao Yan
Author: Mehdi Banakar
Author: Denh Tran
Author: Shenghao Liu
Author: Fanfan Meng
Author: Bigeng Chen ORCID iD
Author: Yanli Qi
Author: Xia Chen ORCID iD
Author: Lorenzo Mastronardi ORCID iD
Author: Rijan Maharjan
Author: Sanket Bohora
Author: Ashim Dhakal
Author: Iain Crowe
Author: Ankur Khurana
Author: Krishna Balram
Author: Luca Zagaglia
Author: Francesco Floris
Author: Peter O'Brien
Author: Eugenio Di Gaetano
Author: Harold Chong ORCID iD
Author: Frederic Gardes
Author: David Thomson
Author: Marc Sorel
Author: Graham Reed

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×