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Performance analysis of a silicon NOEMS device applied as optical modulator based on a slot waveguide

Performance analysis of a silicon NOEMS device applied as optical modulator based on a slot waveguide
Performance analysis of a silicon NOEMS device applied as optical modulator based on a slot waveguide
In this paper, we analyse the performance of a silicon nano-opto-electro-mechanical system (NOEMS) applied as an optical modulator, based on a suspended slot waveguide driven by electrostatic forces. The analysis is carried out with the help of the finite element analysis (FEA) method involving the influences from Casimir force, optical force and electrostatic force. The performance of the modulator are analysed from aspects of actuating modes, actuating voltage, modulating frequency, effective index, phase change, and energy consumption using the FEA method. Simulation results show that a suspended slot modulator has the advantages of low actuation voltage, low power consumption, as well as large effective index and phase change compared with modulators based upon other approaches. The performance of such a modulator can fill the performance gap between the carrier-based approach and Micro-opto-electro-mechanical system (MOEMS) approach for modulation.
1094-4087
Feng, Yu
631d9d39-ac55-4282-ab98-5b7d0dd2682e
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Feng, Yu
631d9d39-ac55-4282-ab98-5b7d0dd2682e
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828

Feng, Yu, Thomson, David, Mashanovich, Goran and Yan, Jize (2020) Performance analysis of a silicon NOEMS device applied as optical modulator based on a slot waveguide. Optics Express, 28 (25). (doi:10.1364/OE.411933).

Record type: Article

Abstract

In this paper, we analyse the performance of a silicon nano-opto-electro-mechanical system (NOEMS) applied as an optical modulator, based on a suspended slot waveguide driven by electrostatic forces. The analysis is carried out with the help of the finite element analysis (FEA) method involving the influences from Casimir force, optical force and electrostatic force. The performance of the modulator are analysed from aspects of actuating modes, actuating voltage, modulating frequency, effective index, phase change, and energy consumption using the FEA method. Simulation results show that a suspended slot modulator has the advantages of low actuation voltage, low power consumption, as well as large effective index and phase change compared with modulators based upon other approaches. The performance of such a modulator can fill the performance gap between the carrier-based approach and Micro-opto-electro-mechanical system (MOEMS) approach for modulation.

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Accepted/In Press date: 1 November 2020
e-pub ahead of print date: 2 December 2020

Identifiers

Local EPrints ID: 445383
URI: http://eprints.soton.ac.uk/id/eprint/445383
ISSN: 1094-4087
PURE UUID: 1de84ef9-31ef-4027-9ec8-6759b87ba889
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

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Date deposited: 07 Dec 2020 17:31
Last modified: 18 Feb 2021 17:25

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