Performance analysis of a silicon NOEMS device applied as optical modulator based on a slot waveguide
Performance analysis of a silicon NOEMS device applied as optical modulator based on a slot waveguide
In this paper, we analyse the performance of a silicon nano-opto-electro-mechanical system (NOEMS) applied as an optical modulator, based on a suspended slot waveguide driven by electrostatic forces. The analysis is carried out with the help of the finite element analysis (FEA) method involving the influences from Casimir force, optical force and electrostatic force. The performance of the modulator are analysed from aspects of actuating modes, actuating voltage, modulating frequency, effective index, phase change, and energy consumption using the FEA method. Simulation results show that a suspended slot modulator has the advantages of low actuation voltage, low power consumption, as well as large effective index and phase change compared with modulators based upon other approaches. The performance of such a modulator can fill the performance gap between the carrier-based approach and Micro-opto-electro-mechanical system (MOEMS) approach for modulation.
38206-38222
Feng, Yu
631d9d39-ac55-4282-ab98-5b7d0dd2682e
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
7 December 2020
Feng, Yu
631d9d39-ac55-4282-ab98-5b7d0dd2682e
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Feng, Yu, Thomson, David, Mashanovich, Goran and Yan, Jize
(2020)
Performance analysis of a silicon NOEMS device applied as optical modulator based on a slot waveguide.
Optics Express, 28 (25), .
(doi:10.1364/OE.411933).
Abstract
In this paper, we analyse the performance of a silicon nano-opto-electro-mechanical system (NOEMS) applied as an optical modulator, based on a suspended slot waveguide driven by electrostatic forces. The analysis is carried out with the help of the finite element analysis (FEA) method involving the influences from Casimir force, optical force and electrostatic force. The performance of the modulator are analysed from aspects of actuating modes, actuating voltage, modulating frequency, effective index, phase change, and energy consumption using the FEA method. Simulation results show that a suspended slot modulator has the advantages of low actuation voltage, low power consumption, as well as large effective index and phase change compared with modulators based upon other approaches. The performance of such a modulator can fill the performance gap between the carrier-based approach and Micro-opto-electro-mechanical system (MOEMS) approach for modulation.
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Performance analysis of a silicon NOEMS
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Accepted/In Press date: 1 November 2020
e-pub ahead of print date: 2 December 2020
Published date: 7 December 2020
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Funding Information:
The authors thank silicon photonics group for necessary guidance and assistance in the simulations. Yu Feng acknowledges scholarship from the China Scholarship Council for his PhD study. Dr. David J. Thomson acknowledges funding from the Royal Society for his University Research Fellowship.
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© 2020 OSA - The Optical Society. All rights reserved.
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Local EPrints ID: 445383
URI: http://eprints.soton.ac.uk/id/eprint/445383
ISSN: 1094-4087
PURE UUID: 1de84ef9-31ef-4027-9ec8-6759b87ba889
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Date deposited: 07 Dec 2020 17:31
Last modified: 17 Mar 2024 03:39
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Yu Feng
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