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A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors

A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors
A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors

This paper proposes a low-noise MEMS interface circuit which has very small parasitic capacitance at the input node. The circuit presented is suitable for the MEMS cochlea-mimicking acoustic sensors which are highly parasitic-sensitive due to their low intrinsic sensing capacitance. In order to reduce the electronic noise of the interface circuit, chopper stabilization technique is implemented, and an effective method to optimize the critical transistor size for best noise performance is derived. Simulation results show that, for a MEMS sensing structure with 200 fF static capacitance, the interface circuit achieves a 0.72 aF equivalent capacitance noise floor over 100 Hz to 20 kHz audio bandwidth.

1151-1154
Wang, Shiwei
97433cb6-7752-4c68-89f8-933f233d8642
Koickal, Thomas Jacob
ca8588e6-32a5-4d70-8068-0a17178a5cc8
Hamilton, A.
248e45ad-b658-4af3-9bdb-b09caeae9238
Mastropaolo, E.
b6991cbf-7da3-4a8b-9a4d-cddab941727b
Latif, R.
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Cheung, R.
6e95e1b3-1506-43d3-a1d1-578ddbcb7708
Newton, M.
62121b11-1dbb-456b-a6e8-5f011aab566d
Smith, L.
cd83099c-eee3-461d-8989-df88d91dfc3d
Wang, Shiwei
97433cb6-7752-4c68-89f8-933f233d8642
Koickal, Thomas Jacob
ca8588e6-32a5-4d70-8068-0a17178a5cc8
Hamilton, A.
248e45ad-b658-4af3-9bdb-b09caeae9238
Mastropaolo, E.
b6991cbf-7da3-4a8b-9a4d-cddab941727b
Latif, R.
8e3fc8b0-0403-4cf5-8ce8-e311fcd8dfb6
Cheung, R.
6e95e1b3-1506-43d3-a1d1-578ddbcb7708
Newton, M.
62121b11-1dbb-456b-a6e8-5f011aab566d
Smith, L.
cd83099c-eee3-461d-8989-df88d91dfc3d

Wang, Shiwei, Koickal, Thomas Jacob, Hamilton, A., Mastropaolo, E., Latif, R., Cheung, R., Newton, M. and Smith, L. (2012) A low-noise interface circuit for MEMS cochlea-mimicking acoustic sensors. 2012 IEEE International Symposium on Circuits and Systems, ISCAS 2012, , Seoul, Korea, Republic of. 19 - 22 May 2012. pp. 1151-1154 . (doi:10.1109/ISCAS.2012.6271436).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper proposes a low-noise MEMS interface circuit which has very small parasitic capacitance at the input node. The circuit presented is suitable for the MEMS cochlea-mimicking acoustic sensors which are highly parasitic-sensitive due to their low intrinsic sensing capacitance. In order to reduce the electronic noise of the interface circuit, chopper stabilization technique is implemented, and an effective method to optimize the critical transistor size for best noise performance is derived. Simulation results show that, for a MEMS sensing structure with 200 fF static capacitance, the interface circuit achieves a 0.72 aF equivalent capacitance noise floor over 100 Hz to 20 kHz audio bandwidth.

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More information

Published date: 28 September 2012
Venue - Dates: 2012 IEEE International Symposium on Circuits and Systems, ISCAS 2012, , Seoul, Korea, Republic of, 2012-05-19 - 2012-05-22

Identifiers

Local EPrints ID: 445896
URI: http://eprints.soton.ac.uk/id/eprint/445896
PURE UUID: 6191c3a7-f510-4fa9-bdd4-a1357e3ef8fa
ORCID for Shiwei Wang: ORCID iD orcid.org/0000-0002-5450-2108

Catalogue record

Date deposited: 13 Jan 2021 17:31
Last modified: 07 Sep 2021 02:04

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Contributors

Author: Shiwei Wang ORCID iD
Author: Thomas Jacob Koickal
Author: A. Hamilton
Author: E. Mastropaolo
Author: R. Latif
Author: R. Cheung
Author: M. Newton
Author: L. Smith

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