Nanometallic antenna assisted amorphous silicon waveguide integrated bolometer for mid-infrared

Abstract

Bolometers are thermal detectors widely applied in the mid-infrared (MIR) wavelength range. MIR silicon photonics is a promising platform for emerging applications, e.g. in optical sensing, for its low cost and high volume manufacturing potential. In an integrated sensing system on chip, a broadband scalable bolometer absorbing the light over the whole MIR wavelength range could play an important role. In this work we have developed a waveguide-based bolometer operating in the wavelength range of 3.72 - 3.88μm on the amorphous silicon (a-Si) platform. Significant improvements in the bolometer design result in a 20x improved responsivity compared to earlier work on SOI. The bolometer offers 24.62 % change in resistance per milliwatt of inputpower at 3.8μm wavelength. The thermal conductance of the bolometer is 3.86×10^-5W/K and an improvement as large as 3 orders magnitude may be possible in the future through redesign of the device geometry.

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