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Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays

Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays
Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays

Silicon nitride (SiNx), an associated CMOS photonics enabling material, provides a promising and complementary photonic platform for the development of low-cost CMOS compatible waveguides and related photonic components. We propose a 16 element-2D scanning optical phased array circuit based on a Si-rich core, which reconciliates the requirements of power handling and field-of-view for automotive LiDAR. This dispersive optical phased array consists of wavelength-dependent grating coupler antenna arrays and spiral-delay lines that allow achieving a field-of-view of (35° × 17°) and an angular resolution of (0.15° × 1.2°).

Optical phased array, silicon nitride, wavelength scanning
0277-786X
1-10
SPIE
Ilie, Stefan Tudor
9ff80b2a-1998-41dd-9eed-7b010cbbf3a9
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Rutirawut, Teerapat
590101f7-65c8-4da3-9a5d-e3d2efd74349
Mastronardi, Lorenzo
ea0aef76-de7e-4bdc-85be-1dc62dbf7802
Skandalos, Ilias
3daa2bbe-f6ee-4b6e-ac57-46df0c21c732
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
He, Sailing
Vivien, Laurent
Ilie, Stefan Tudor
9ff80b2a-1998-41dd-9eed-7b010cbbf3a9
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Rutirawut, Teerapat
590101f7-65c8-4da3-9a5d-e3d2efd74349
Mastronardi, Lorenzo
ea0aef76-de7e-4bdc-85be-1dc62dbf7802
Skandalos, Ilias
3daa2bbe-f6ee-4b6e-ac57-46df0c21c732
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
He, Sailing
Vivien, Laurent

Ilie, Stefan Tudor, Domínguez Bucio, Thalia, Rutirawut, Teerapat, Mastronardi, Lorenzo, Skandalos, Ilias, Chong, Harold and Gardes, Frederic (2021) Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays. He, Sailing and Vivien, Laurent (eds.) In Smart Photonic and Optoelectronic Integrated Circuits XXIII. vol. 11690, SPIE. pp. 1-10 . (doi:10.1117/12.2578251).

Record type: Conference or Workshop Item (Paper)

Abstract

Silicon nitride (SiNx), an associated CMOS photonics enabling material, provides a promising and complementary photonic platform for the development of low-cost CMOS compatible waveguides and related photonic components. We propose a 16 element-2D scanning optical phased array circuit based on a Si-rich core, which reconciliates the requirements of power handling and field-of-view for automotive LiDAR. This dispersive optical phased array consists of wavelength-dependent grating coupler antenna arrays and spiral-delay lines that allow achieving a field-of-view of (35° × 17°) and an angular resolution of (0.15° × 1.2°).

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More information

Published date: 5 March 2021
Additional Information: Funding Information: The author acknowledge the financial support of the Engineering and Physical Sciences Research Council (EPSRC) and UK Research and Innovation (UKRI). Publisher Copyright: © 2021 SPIE.
Venue - Dates: SPIE LASE, 2021, Online Only: Photonics West, Online only, San Francisco, United States, 2021-03-06 - 2021-03-11
Keywords: Optical phased array, silicon nitride, wavelength scanning
Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Sustainable Electronic Technologies research

Identifiers

Local EPrints ID: 448020
URI: http://eprints.soton.ac.uk/id/eprint/448020
DOI: doi:10.1117/12.2578251
ISSN: 0277-786X
PURE UUID: b302db68-7c89-483c-a7c8-1e9016a340cd
ORCID for Thalia Domínguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for Lorenzo Mastronardi: ORCID iD orcid.org/0000-0003-1489-2778
ORCID for Ilias Skandalos: ORCID iD orcid.org/0000-0002-9021-1420
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Frederic Gardes: ORCID iD orcid.org/0000-0003-1400-3272

Catalogue record

Date deposited: 30 Mar 2021 16:34
Last modified: 09 Oct 2024 02:12

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Contributors

Author: Stefan Tudor Ilie
Author: Thalia Domínguez Bucio ORCID iD
Author: Teerapat Rutirawut
Author: Lorenzo Mastronardi ORCID iD
Author: Ilias Skandalos ORCID iD
Author: Harold Chong ORCID iD
Author: Frederic Gardes ORCID iD
Editor: Sailing He
Editor: Laurent Vivien

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