Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays
Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays
Silicon nitride (SiNx), an associated CMOS photonics enabling material, provides a promising and complementary photonic platform for the development of low-cost CMOS compatible waveguides and related photonic components. We propose a 16 element-2D scanning optical phased array circuit based on a Si-rich core, which reconciliates the requirements of power handling and field-of-view for automotive LiDAR. This dispersive optical phased array consists of wavelength-dependent grating coupler antenna arrays and spiral-delay lines that allow achieving a field-of-view of (35° × 17°) and an angular resolution of (0.15° × 1.2°).
Optical phased array, silicon nitride, wavelength scanning
1-10
Ilie, Stefan Tudor
9ff80b2a-1998-41dd-9eed-7b010cbbf3a9
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Rutirawut, Teerapat
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Mastronardi, Lorenzo
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Skandalos, Ilias
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Chong, Harold
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Gardes, Frederic
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5 March 2021
Ilie, Stefan Tudor
9ff80b2a-1998-41dd-9eed-7b010cbbf3a9
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Rutirawut, Teerapat
590101f7-65c8-4da3-9a5d-e3d2efd74349
Mastronardi, Lorenzo
ea0aef76-de7e-4bdc-85be-1dc62dbf7802
Skandalos, Ilias
3daa2bbe-f6ee-4b6e-ac57-46df0c21c732
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Ilie, Stefan Tudor, Domínguez Bucio, Thalia, Rutirawut, Teerapat, Mastronardi, Lorenzo, Skandalos, Ilias, Chong, Harold and Gardes, Frederic
(2021)
Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays.
He, Sailing and Vivien, Laurent
(eds.)
In Smart Photonic and Optoelectronic Integrated Circuits XXIII.
vol. 11690,
SPIE.
.
(doi:10.1117/12.2578251).
Record type:
Conference or Workshop Item
(Paper)
Abstract
Silicon nitride (SiNx), an associated CMOS photonics enabling material, provides a promising and complementary photonic platform for the development of low-cost CMOS compatible waveguides and related photonic components. We propose a 16 element-2D scanning optical phased array circuit based on a Si-rich core, which reconciliates the requirements of power handling and field-of-view for automotive LiDAR. This dispersive optical phased array consists of wavelength-dependent grating coupler antenna arrays and spiral-delay lines that allow achieving a field-of-view of (35° × 17°) and an angular resolution of (0.15° × 1.2°).
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More information
Published date: 5 March 2021
Additional Information:
Funding Information:
The author acknowledge the financial support of the Engineering and Physical Sciences Research Council (EPSRC) and UK Research and Innovation (UKRI).
Publisher Copyright:
© 2021 SPIE.
Venue - Dates:
SPIE LASE, 2021, Online Only: Photonics West, Online only, San Francisco, United States, 2021-03-06 - 2021-03-11
Keywords:
Optical phased array, silicon nitride, wavelength scanning
Identifiers
Local EPrints ID: 448020
URI: http://eprints.soton.ac.uk/id/eprint/448020
ISSN: 0277-786X
PURE UUID: b302db68-7c89-483c-a7c8-1e9016a340cd
Catalogue record
Date deposited: 30 Mar 2021 16:34
Last modified: 17 Mar 2024 03:52
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Contributors
Author:
Stefan Tudor Ilie
Author:
Lorenzo Mastronardi
Author:
Harold Chong
Editor:
Sailing He
Editor:
Laurent Vivien
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