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Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays

Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays
Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays
Silicon nitride (SiNx), an associated CMOS photonics enabling material, provides a promising and complementary photonic platform for the development of low-cost CMOS compatible waveguides and related photonic components. We propose a 16 element - 2D scanning optical phased array circuit based on a Si-rich core, which reconciliates the requirements of power handling and field-of-view for automotive LiDAR. This dispersive optical phased array consists of wavelength-dependent grating coupler antenna arrays and spiral-delay lines that allow achieving a field-of-view of (35°x 17°) and an angular resolution of (0.15°x1.2°).
11690
1-10
SPIE
Ilie, Stefan Tudor
9ff80b2a-1998-41dd-9eed-7b010cbbf3a9
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Rutirawut, Teerapat
590101f7-65c8-4da3-9a5d-e3d2efd74349
Mastronardi, Lorenzo
ea0aef76-de7e-4bdc-85be-1dc62dbf7802
Skandalos, Ilias
8a38a06a-38fd-47fd-a469-1165fa7fe9ac
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Ilie, Stefan Tudor
9ff80b2a-1998-41dd-9eed-7b010cbbf3a9
Domínguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Rutirawut, Teerapat
590101f7-65c8-4da3-9a5d-e3d2efd74349
Mastronardi, Lorenzo
ea0aef76-de7e-4bdc-85be-1dc62dbf7802
Skandalos, Ilias
8a38a06a-38fd-47fd-a469-1165fa7fe9ac
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2

Ilie, Stefan Tudor, Domínguez Bucio, Thalia, Rutirawut, Teerapat, Mastronardi, Lorenzo, Skandalos, Ilias, Chong, Harold and Gardes, Frederic (2021) Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays. In Smart Photonic and Optoelectronic Integrated Circuits XXIII. SPIE. pp. 1-10 . (doi:10.1117/12.2578251).

Record type: Conference or Workshop Item (Paper)

Abstract

Silicon nitride (SiNx), an associated CMOS photonics enabling material, provides a promising and complementary photonic platform for the development of low-cost CMOS compatible waveguides and related photonic components. We propose a 16 element - 2D scanning optical phased array circuit based on a Si-rich core, which reconciliates the requirements of power handling and field-of-view for automotive LiDAR. This dispersive optical phased array consists of wavelength-dependent grating coupler antenna arrays and spiral-delay lines that allow achieving a field-of-view of (35°x 17°) and an angular resolution of (0.15°x1.2°).

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More information

Published date: 5 March 2021
Venue - Dates: SPIE LASE, 2021, Online Only: Photonics West, Online only, San Francisco, United States, 2021-03-06 - 2021-03-11

Identifiers

Local EPrints ID: 448020
URI: http://eprints.soton.ac.uk/id/eprint/448020
PURE UUID: b302db68-7c89-483c-a7c8-1e9016a340cd
ORCID for Thalia Domínguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for Lorenzo Mastronardi: ORCID iD orcid.org/0000-0003-1489-2778
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 30 Mar 2021 16:34
Last modified: 13 Apr 2021 02:01

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