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Optical metrology of sub-wavelength objects enabled by artificial intelligence

Optical metrology of sub-wavelength objects enabled by artificial intelligence
Optical metrology of sub-wavelength objects enabled by artificial intelligence
Microscopes and various forms of interferometers have been used for decades in optical metrology of objects that are typically larger than the wavelength of light λ. However, metrology of subwavelength objects was deemed impossible due to the diffraction limit. We report that measurement of the physical size of sub-wavelength objects with accuracy exceeding λ/800 by analyzing the diffraction pattern of coherent light scattered by the objects with deep learning enabled analysis. With a 633nm laser, we show that the width of sub-wavelength slits in opaque screen can be measured with accuracy of 0.77nm, challenging the accuracy of electron beam and ion beam lithographies. The technique is suitable for high-rate non-contact measurements of nanometric sizes in smart manufacturing applications with integrated metrology and processing tools.
2331-8422
Rendon-Barraza, Carolina
8330193a-4b7d-45c8-8427-20de72e861b8
Aik Chan, Eng
803a26e6-c74c-47fe-943b-80f790955e3b
Yuan, Guanghui
d7af6f06-7da9-41ef-b7f9-cfe09e55fcaa
Adamo, Giorgio
8c4da92b-f849-42d4-99c8-b0eb4ba1c73a
Pu, Tanchao
89eb5a37-31bf-469a-ae29-c871d5d25c65
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6
Rendon-Barraza, Carolina
8330193a-4b7d-45c8-8427-20de72e861b8
Aik Chan, Eng
803a26e6-c74c-47fe-943b-80f790955e3b
Yuan, Guanghui
d7af6f06-7da9-41ef-b7f9-cfe09e55fcaa
Adamo, Giorgio
8c4da92b-f849-42d4-99c8-b0eb4ba1c73a
Pu, Tanchao
89eb5a37-31bf-469a-ae29-c871d5d25c65
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6

Rendon-Barraza, Carolina, Aik Chan, Eng, Yuan, Guanghui, Adamo, Giorgio, Pu, Tanchao and Zheludev, Nikolai (2020) Optical metrology of sub-wavelength objects enabled by artificial intelligence. arXiv. (Submitted)

Record type: Article

Abstract

Microscopes and various forms of interferometers have been used for decades in optical metrology of objects that are typically larger than the wavelength of light λ. However, metrology of subwavelength objects was deemed impossible due to the diffraction limit. We report that measurement of the physical size of sub-wavelength objects with accuracy exceeding λ/800 by analyzing the diffraction pattern of coherent light scattered by the objects with deep learning enabled analysis. With a 633nm laser, we show that the width of sub-wavelength slits in opaque screen can be measured with accuracy of 0.77nm, challenging the accuracy of electron beam and ion beam lithographies. The technique is suitable for high-rate non-contact measurements of nanometric sizes in smart manufacturing applications with integrated metrology and processing tools.

Text
Optical Metrology of Sub-Wavelength Objects Enabled by Artificial Intelligence. - Accepted Manuscript
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More information

Submitted date: 11 May 2020

Identifiers

Local EPrints ID: 450020
URI: http://eprints.soton.ac.uk/id/eprint/450020
ISSN: 2331-8422
PURE UUID: 2201ec94-bdef-44d1-934d-f506c74df965
ORCID for Tanchao Pu: ORCID iD orcid.org/0000-0002-1782-5653
ORCID for Nikolai Zheludev: ORCID iD orcid.org/0000-0002-1013-6636

Catalogue record

Date deposited: 06 Jul 2021 16:30
Last modified: 30 Sep 2021 02:05

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Contributors

Author: Carolina Rendon-Barraza
Author: Eng Aik Chan
Author: Guanghui Yuan
Author: Giorgio Adamo
Author: Tanchao Pu ORCID iD

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