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Development of Systematic Fitting Model for Nonlinear Nanoelectromechanical Resonance Analysis

Development of Systematic Fitting Model for Nonlinear Nanoelectromechanical Resonance Analysis
Development of Systematic Fitting Model for Nonlinear Nanoelectromechanical Resonance Analysis
A series of nonlinear resonance behaviors, observed for multiple systematically designed doubly-clamped NEMS resonators, have been successfully analyzed using a model which was developed based on the nonlinear Duffing equation and experimentally estimated parameter inputs. Key parameters in the model, such as resonance frequency, nonlinear cubic stiffness coefficient, and quality factor, have been extracted consistently by fitting the dataset taken under varied DC and AC biasing. Systematic nonlinear resonance with frequencies of up to 221MHz has been observed and analyzed for the first time. This result will be useful for analysis of further scaled NEMS resonators and for emerging applications of NEMS resonators where the nonlinearity is essential for device and system operation.
Nanomechanical system, RF, nonlinear characteristic, resonator
611-614
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
5e710732-a69b-4ee0-bb61-066aaf5dadea
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
5e710732-a69b-4ee0-bb61-066aaf5dadea
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2

Ben, Fang, Fernando, James, Ou, Jun-Yu and Tsuchiya, Yoshishige (2021) Development of Systematic Fitting Model for Nonlinear Nanoelectromechanical Resonance Analysis. 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Gainesville and Online, Gainesville, United States. 25 - 29 Jan 2021. pp. 611-614 . (doi:10.1109/MEMS51782.2021.9375461).

Record type: Conference or Workshop Item (Paper)

Abstract

A series of nonlinear resonance behaviors, observed for multiple systematically designed doubly-clamped NEMS resonators, have been successfully analyzed using a model which was developed based on the nonlinear Duffing equation and experimentally estimated parameter inputs. Key parameters in the model, such as resonance frequency, nonlinear cubic stiffness coefficient, and quality factor, have been extracted consistently by fitting the dataset taken under varied DC and AC biasing. Systematic nonlinear resonance with frequencies of up to 221MHz has been observed and analyzed for the first time. This result will be useful for analysis of further scaled NEMS resonators and for emerging applications of NEMS resonators where the nonlinearity is essential for device and system operation.

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Accepted/In Press date: 24 November 2020
Published date: 15 March 2021
Venue - Dates: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Gainesville and Online, Gainesville, United States, 2021-01-25 - 2021-01-29
Keywords: Nanomechanical system, RF, nonlinear characteristic, resonator

Identifiers

Local EPrints ID: 453264
URI: http://eprints.soton.ac.uk/id/eprint/453264
PURE UUID: b5c505c8-55df-4adb-a7ad-9a10e7be6f68
ORCID for Fang Ben: ORCID iD orcid.org/0000-0002-8486-5583
ORCID for James Fernando: ORCID iD orcid.org/0000-0002-2526-8455
ORCID for Jun-Yu Ou: ORCID iD orcid.org/0000-0001-8028-6130

Catalogue record

Date deposited: 11 Jan 2022 17:50
Last modified: 21 Jun 2022 01:53

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Contributors

Author: Fang Ben ORCID iD
Author: James Fernando ORCID iD
Author: Jun-Yu Ou ORCID iD
Author: Yoshishige Tsuchiya

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