The University of Southampton
University of Southampton Institutional Repository

Deep learning-assisted focused ion beam nanofabrication

Deep learning-assisted focused ion beam nanofabrication
Deep learning-assisted focused ion beam nanofabrication
Deep learning can be used to predict the post-fabrication appearance of structures manufactured by focused ion beam (FIB) milling, accounting for variations in beam focusing/scanning parameters and target medium characteristics with nanoscale accuracy. With predictions generated in milliseconds, the approach can expedite process optimization and enhance precision/reproducibility in FIB nanofabrication.
Buchnev, Oleksandr
60cdb0d2-3388-47be-a066-61b3b396f69d
Grant-Jacob, James
c5d144d8-3c43-4195-8e80-edd96bfda91b
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6
Mills, Benjamin
05f1886e-96ef-420f-b856-4115f4ab36d0
MacDonald, Kevin F.
76c84116-aad1-4973-b917-7ca63935dba5
Buchnev, Oleksandr
60cdb0d2-3388-47be-a066-61b3b396f69d
Grant-Jacob, James
c5d144d8-3c43-4195-8e80-edd96bfda91b
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6
Mills, Benjamin
05f1886e-96ef-420f-b856-4115f4ab36d0
MacDonald, Kevin F.
76c84116-aad1-4973-b917-7ca63935dba5

Buchnev, Oleksandr, Grant-Jacob, James, Eason, R.W., Zheludev, Nikolai, Mills, Benjamin and MacDonald, Kevin F. (2022) Deep learning-assisted focused ion beam nanofabrication. 8th International Topical Meeting on Nanophotonics and Metamaterials, , Seefeld-in-Tirol, Austria. 28 - 31 Mar 2022.

Record type: Conference or Workshop Item (Paper)

Abstract

Deep learning can be used to predict the post-fabrication appearance of structures manufactured by focused ion beam (FIB) milling, accounting for variations in beam focusing/scanning parameters and target medium characteristics with nanoscale accuracy. With predictions generated in milliseconds, the approach can expedite process optimization and enhance precision/reproducibility in FIB nanofabrication.

Text
AI-FIB nanofab - Accepted Manuscript
Available under License Creative Commons Attribution.
Download (163kB)

More information

Published date: 28 March 2022
Venue - Dates: 8th International Topical Meeting on Nanophotonics and Metamaterials, , Seefeld-in-Tirol, Austria, 2022-03-28 - 2022-03-31

Identifiers

Local EPrints ID: 454137
URI: http://eprints.soton.ac.uk/id/eprint/454137
PURE UUID: f3f96b85-edbb-40f2-8286-a7a1f663f5cc
ORCID for James Grant-Jacob: ORCID iD orcid.org/0000-0002-4270-4247
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204
ORCID for Nikolai Zheludev: ORCID iD orcid.org/0000-0002-1013-6636
ORCID for Benjamin Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for Kevin F. MacDonald: ORCID iD orcid.org/0000-0002-3877-2976

Catalogue record

Date deposited: 01 Feb 2022 17:39
Last modified: 27 Apr 2022 04:01

Export record

Contributors

Author: Oleksandr Buchnev
Author: R.W. Eason ORCID iD
Author: Benjamin Mills ORCID iD

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×