Etchless pedestal chalcogenide waveguide platform for long-wave IR applications
Etchless pedestal chalcogenide waveguide platform for long-wave IR applications
We report the fabrication of GeAsSeTe/GeAsSe waveguides using a simple and cost-effective process. Chalcogenides are very delicate materials and can be degraded when in contact with developer solutions during photolithography and when processed using common etchants, making the use of conventional fabrication processes unattractive. In order to avoid any post-film deposition processing for the fabrication of chalcogenide waveguides, we pre-patterned pedestal structures on silicon substrates using photolithography and a simple wet-etch process followed by the deposition of chalcogenide films on the patterned structures. Using the scattered light decay fitting method, we estimated waveguide propagation losses averaging approximately 0.9 dB/cm for wavelengths between 7 and 11 μm. With these findings we show that this waveguide platform is a very attractive candidate for long-wave infrared applications.
1154 - 1162
Mourgelas, Vasileios
7f9f5519-f86c-4c96-8a5d-a97c0ec9fdb5
Sessions, Neil
ee737092-56b4-403e-a2f9-764e07e42625
Wilkinson, James S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Murugan, Ganapathy Senthil
a867686e-0535-46cc-ad85-c2342086b25b
1 March 2022
Mourgelas, Vasileios
7f9f5519-f86c-4c96-8a5d-a97c0ec9fdb5
Sessions, Neil
ee737092-56b4-403e-a2f9-764e07e42625
Wilkinson, James S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Murugan, Ganapathy Senthil
a867686e-0535-46cc-ad85-c2342086b25b
Mourgelas, Vasileios, Sessions, Neil, Wilkinson, James S. and Murugan, Ganapathy Senthil
(2022)
Etchless pedestal chalcogenide waveguide platform for long-wave IR applications.
Optical Materials Express, 12 (3), .
(doi:10.1364/OME.448376).
Abstract
We report the fabrication of GeAsSeTe/GeAsSe waveguides using a simple and cost-effective process. Chalcogenides are very delicate materials and can be degraded when in contact with developer solutions during photolithography and when processed using common etchants, making the use of conventional fabrication processes unattractive. In order to avoid any post-film deposition processing for the fabrication of chalcogenide waveguides, we pre-patterned pedestal structures on silicon substrates using photolithography and a simple wet-etch process followed by the deposition of chalcogenide films on the patterned structures. Using the scattered light decay fitting method, we estimated waveguide propagation losses averaging approximately 0.9 dB/cm for wavelengths between 7 and 11 μm. With these findings we show that this waveguide platform is a very attractive candidate for long-wave infrared applications.
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More information
Accepted/In Press date: 14 December 2021
Published date: 1 March 2022
Additional Information:
Funding Information:
The authors would like to acknowledge the funding support received from the UK EPSRC
Funding Information:
Engineering and Physical Sciences Research Council (EP/N00762X/1).
Publisher Copyright:
© 2022 Optica Publishing Group.
Identifiers
Local EPrints ID: 454739
URI: http://eprints.soton.ac.uk/id/eprint/454739
ISSN: 2159-3930
PURE UUID: 67967e96-79fd-4923-81ae-f6f5460cbacd
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Date deposited: 22 Feb 2022 17:38
Last modified: 17 Mar 2024 03:03
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Contributors
Author:
Vasileios Mourgelas
Author:
Neil Sessions
Author:
Ganapathy Senthil Murugan
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