Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics

Abstract

Solid state beam steering devices are key elements in low cost, robust, three-dimensional imaging systems. Here we present a silicon photonic beam steering device based upon an 8 x 8 grating coupler focal plane array approach fed by a thermo-optic Mach Zehnder switching tree. In this device transmission of the light from the grating couplers is made through the back side of the chip using topside mirrors allowing for both high efficiency out coupling and direct flip-chip integration of drive electronics, providing a path to scale to denser focal plane arrays with large numbers of points in the future. -13.8dB fibre-to-fibre transmission was achieved in our preliminary test around 1523 nm for the beam steering chip.

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