Optical metrology with sub-atomic resolution

MacDonald, Kevin F., Liu, Tongjun, Ou, Jun-Yu and Zheludev, Nikolai (2022) Optical metrology with sub-atomic resolution. 8th International Topical Meeting on Nanophotonics and Metamaterials, , Seefeld-in-Tirol, Austria. 28 - 31 Mar 2022. 1 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

The relative positions of nanostructures can be measured with picometric resolution using scattering of free electrons or topologically structured light at sharp edges of the structures. Through artificial intelligence enabled analysis of scattered coherent light, sub-atomic resolution is achievable in single-shot measurements.

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Published date: 28 March 2022

Venue - Dates: 8th International Topical Meeting on Nanophotonics and Metamaterials, , Seefeld-in-Tirol, Austria, 2022-03-28 - 2022-03-31

Learn more about Zepler Institute for Photonics and Nanoelectronics research

Identifiers

Local EPrints ID: 455931

URI: http://eprints.soton.ac.uk/id/eprint/455931

PURE UUID: 2a20e395-c742-474e-9a63-a5cb06194c1f

ORCID for Kevin F. MacDonald:

orcid.org/0000-0002-3877-2976

ORCID for Jun-Yu Ou:

orcid.org/0000-0001-8028-6130

ORCID for Nikolai Zheludev:

orcid.org/0000-0002-1013-6636

Catalogue record

Date deposited: 08 Apr 2022 17:51

Last modified: 17 Mar 2024 07:11

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Contributors

Author: Kevin F. MacDonald

Author: Tongjun Liu

Author: Jun-Yu Ou

Author: Nikolai Zheludev

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