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Optical metrology with sub-atomic resolution

Optical metrology with sub-atomic resolution
Optical metrology with sub-atomic resolution
The relative positions of nanostructures can be measured with picometric resolution using scattering of free electrons or topologically structured light at sharp edges of the structures. Through artificial intelligence enabled analysis of scattered coherent light, sub-atomic resolution is achievable in single-shot measurements.
MacDonald, Kevin F.
76c84116-aad1-4973-b917-7ca63935dba5
Liu, Tongjun
53eb4a71-ea7b-4aa7-b96d-b70c5df1dd63
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6
MacDonald, Kevin F.
76c84116-aad1-4973-b917-7ca63935dba5
Liu, Tongjun
53eb4a71-ea7b-4aa7-b96d-b70c5df1dd63
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6

MacDonald, Kevin F., Liu, Tongjun, Ou, Jun-Yu and Zheludev, Nikolai (2022) Optical metrology with sub-atomic resolution. 8th International Topical Meeting on Nanophotonics and Metamaterials, , Seefeld-in-Tirol, Austria. 28 - 31 Mar 2022. 1 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

The relative positions of nanostructures can be measured with picometric resolution using scattering of free electrons or topologically structured light at sharp edges of the structures. Through artificial intelligence enabled analysis of scattered coherent light, sub-atomic resolution is achievable in single-shot measurements.

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optical metrology with sub-atomic resolution - Accepted Manuscript
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More information

Published date: 28 March 2022
Venue - Dates: 8th International Topical Meeting on Nanophotonics and Metamaterials, , Seefeld-in-Tirol, Austria, 2022-03-28 - 2022-03-31

Identifiers

Local EPrints ID: 455931
URI: http://eprints.soton.ac.uk/id/eprint/455931
PURE UUID: 2a20e395-c742-474e-9a63-a5cb06194c1f
ORCID for Kevin F. MacDonald: ORCID iD orcid.org/0000-0002-3877-2976
ORCID for Jun-Yu Ou: ORCID iD orcid.org/0000-0001-8028-6130
ORCID for Nikolai Zheludev: ORCID iD orcid.org/0000-0002-1013-6636

Catalogue record

Date deposited: 08 Apr 2022 17:51
Last modified: 17 Mar 2024 07:11

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Contributors

Author: Tongjun Liu
Author: Jun-Yu Ou ORCID iD

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