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Effect of implantation of C, Si and Cu into ZrNb nanometric multilayers

Effect of implantation of C, Si and Cu into ZrNb nanometric multilayers
Effect of implantation of C, Si and Cu into ZrNb nanometric multilayers

Sputter-deposited Zr/Nb nanometric multilayer films with a periodicity (L) in the range from 6 to 167 nm were subjected to carbon, silicon and copper ion irradiation with low and high fluences at room temperature. The ion profiles, mechanical proprieties, and disordering behavior have been investigated by using a variety of experimental techniques (Secondary Ion Mass Spectrometry - SIMS, nanoindentation, X-ray diffraction - XRD, and scanning transmission electron microscopy - STEM). On the STEM bright field micrographs there is damage clearly visible on the surface side of the multilayer; deeper, the most damaged and disordered zone, located close to the maximum ion concentration, was observed. The in-depth C and Si concentration profiles obtained from SIMS were not affected by the periodicity of the nanolayers. This is in accordance with SRIM simulations. XRD and electron diffraction analyses suggest a structural evolution in relation to L. After irradiation, Zr (0002) and Nb (110) reflexions overlap for L=6 nm. For the periodicity L> 6 nm the Zr (0002) peak is shifted to higher angles and Nb (110) peak is shifted to lower angles.

Ion irradiation, SIMS, Strain, XRD, Zr/Nb multilayers
944-949
Tanger Ltd.
Daghbouj, Nabil
11efccbe-eb37-4f69-a8c4-1fd21889503e
Karlík, Miroslav
df29ecf1-6f1e-4713-a15a-82b321804596
Lörinčík, Jan
212a5c38-ac73-4f39-ab25-d2eaa17ebb2a
Polcar, Tomáš
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Callisti, Mauro
86e03724-aacc-46d5-bccc-4c7025556667
Havránek, Vladimír
736da580-c407-4fee-b897-606850335608
Daghbouj, Nabil
11efccbe-eb37-4f69-a8c4-1fd21889503e
Karlík, Miroslav
df29ecf1-6f1e-4713-a15a-82b321804596
Lörinčík, Jan
212a5c38-ac73-4f39-ab25-d2eaa17ebb2a
Polcar, Tomáš
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Callisti, Mauro
86e03724-aacc-46d5-bccc-4c7025556667
Havránek, Vladimír
736da580-c407-4fee-b897-606850335608

Daghbouj, Nabil, Karlík, Miroslav, Lörinčík, Jan, Polcar, Tomáš, Callisti, Mauro and Havránek, Vladimír (2019) Effect of implantation of C, Si and Cu into ZrNb nanometric multilayers. In METAL 2019 - 28th International Conference on Metallurgy and Materials, Conference Proceedings. Tanger Ltd. pp. 944-949 . (doi:10.37904/metal.2019.735).

Record type: Conference or Workshop Item (Paper)

Abstract

Sputter-deposited Zr/Nb nanometric multilayer films with a periodicity (L) in the range from 6 to 167 nm were subjected to carbon, silicon and copper ion irradiation with low and high fluences at room temperature. The ion profiles, mechanical proprieties, and disordering behavior have been investigated by using a variety of experimental techniques (Secondary Ion Mass Spectrometry - SIMS, nanoindentation, X-ray diffraction - XRD, and scanning transmission electron microscopy - STEM). On the STEM bright field micrographs there is damage clearly visible on the surface side of the multilayer; deeper, the most damaged and disordered zone, located close to the maximum ion concentration, was observed. The in-depth C and Si concentration profiles obtained from SIMS were not affected by the periodicity of the nanolayers. This is in accordance with SRIM simulations. XRD and electron diffraction analyses suggest a structural evolution in relation to L. After irradiation, Zr (0002) and Nb (110) reflexions overlap for L=6 nm. For the periodicity L> 6 nm the Zr (0002) peak is shifted to higher angles and Nb (110) peak is shifted to lower angles.

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Published date: 2019
Additional Information: Funding Information: Financial support of the European Regional Development Fund (project No. CZ.02.1.01/0.0/0.0/15_003/0000485) and of the Czech Science Foundation (project 17-17921S) is gratefully acknowledged. The irradiation experiments were carried out at the Centre of Accelerators and Nuclear Analytical Methods (CANAM) infrastructure LM 2015056, supported by OP RDE, MEYS, Czech Republic under the project CANAM OP, CZ.02.1.01/0.0/0.0/16_013/0001812. Publisher Copyright: © 2019 TANGER Ltd., Ostrava. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
Venue - Dates: 28th International Conference on Metallurgy and Materials, METAL 2019, , Brno, Czech Republic, 2019-05-22 - 2019-05-24
Keywords: Ion irradiation, SIMS, Strain, XRD, Zr/Nb multilayers

Identifiers

Local EPrints ID: 456249
URI: http://eprints.soton.ac.uk/id/eprint/456249
PURE UUID: 95c5e5f6-787a-4bc3-8a25-d5edd8fb8cca
ORCID for Tomáš Polcar: ORCID iD orcid.org/0000-0002-0863-6287

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Date deposited: 26 Apr 2022 22:08
Last modified: 18 Mar 2024 03:19

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Contributors

Author: Nabil Daghbouj
Author: Miroslav Karlík
Author: Jan Lörinčík
Author: Tomáš Polcar ORCID iD
Author: Mauro Callisti
Author: Vladimír Havránek

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