A low-cost, nanowatt, millimeter-scale memristive-vacuum sensor

Humood, Khaled, Muneer Mutlaq, Saylan, Sueda, Mohammad, Baker and Jaoude, Maguy Abi (2022) A low-cost, nanowatt, millimeter-scale memristive-vacuum sensor. IEEE Sensors Journal, 22 (6), 6080 - 6087. (doi:10.1109/JSEN.2022.3147035).

Record type: Article

Abstract

This work demonstrates a low-power, light-weight, and cost-efficient vacuum pressure sensor and air leak detector based on 2 mm ×2 mm Cu/HfO2/ p^+ -Si memristor device. The operating principle of the proposed sensor relies on monitoring the off-state resistance ( R_off ) of the device, wherein the experimental results show that the R_off value is inversely proportional to the vacuum pressure. The fabricated sensors demonstrated a sensitivity of 493 Torr-1 and power consumption as low as ∼ 8 nW, when tested in a wide range of sub-atmospheric pressure ( 4.9× 10^-5 - 760 ) Torr, making them highly suitable for low-power applications. Furthermore, it is shown that the sensor can be integrated with a microcontroller-based circuitry to serve as a standalone sensing system.

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Low power Memristor Based Resistive Vacuum Sensor - Accepted Manuscript

Available under License University of Southampton Accepted Manuscript Licence.

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Accepted/In Press date: 25 January 2022

Published date: 15 March 2022

Additional Information: Funding Information: This work was supported in part by the UAE Space Agency under Grant K08 2016 001 and in part by the Khalifa University System-on- Chip Center (SoCC) under Grant RC2 2018-020. Publisher Copyright: © 2001-2012 IEEE.

Keywords: ReRAM, Vacuum sensor, air leak detector, memristor

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