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Effects of fast X-Ray cone-beam tomographic measurement on dimensional metrology

Effects of fast X-Ray cone-beam tomographic measurement on dimensional metrology
Effects of fast X-Ray cone-beam tomographic measurement on dimensional metrology
X-ray computed tomography (XCT) is increasingly used for dimensional metrology, where it can offer accurate measurements of internal features that are not accessible with other techniques. However, XCT scanning can be relatively slow, which often prevents routine uptake for many applications. This paper explores the feasibility of improving the speed of XCT measurements whilst maintaining the quality of the dimensional measurements derived from reconstructed volumes. In particular, we compare two approaches to fast XCT acquisition, the use of fewer XCT projections as well as the use of shortened x-ray exposure times for each projection. The study shows that the additional Poisson noise produced by reducing the exposure for each projection has significantly less impact on dimensional measurements compared to the artefacts associated with strategies that take fewer projection images, leading to about half the measurement error variability. Advanced reconstruction algorithms such as the conjugate gradient least squares method or total variation constrained approaches, are shown to allow further improvements in measurement speed, though this can come at the cost of increased measurement bias (e.g. 2.8 % increase in relative error in one example) and variance (e.g. 25 % in the same example).
0026-1394
Rossides, Harry
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Towsyfyan, Hossein
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Biguri, Ander
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Deyhle, Hans P
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Lindroos, Reuben J
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Mavrogordato, Mark
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Boardman, Richard
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Sun, Wenjuan
f8bf5e02-1f30-401a-a9df-31e4e939de26
Blumensath, Thomas
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Rossides, Harry
8ea65ff8-3ba0-46d3-9f88-18553aedfb7d
Towsyfyan, Hossein
f1f4fa2a-20e4-4519-a66b-2faecb50173d
Biguri, Ander
738d1b66-9a99-446f-805d-032dd12445e3
Deyhle, Hans P
aba9cd34-97a0-4238-8255-af673e3beb1a
Lindroos, Reuben J
d448b02f-b678-4cf8-ae23-5c7efb0b30e0
Mavrogordato, Mark
faedf03d-e357-4ec3-818e-e5ff5368fdf0
Boardman, Richard
5818d677-5732-4e8a-a342-7164dbb10df1
Sun, Wenjuan
f8bf5e02-1f30-401a-a9df-31e4e939de26
Blumensath, Thomas
470d9055-0373-457e-bf80-4389f8ec4ead

Rossides, Harry, Towsyfyan, Hossein, Biguri, Ander, Deyhle, Hans P, Lindroos, Reuben J, Mavrogordato, Mark, Boardman, Richard, Sun, Wenjuan and Blumensath, Thomas (2022) Effects of fast X-Ray cone-beam tomographic measurement on dimensional metrology. Metrologia, 59 (044003).

Record type: Article

Abstract

X-ray computed tomography (XCT) is increasingly used for dimensional metrology, where it can offer accurate measurements of internal features that are not accessible with other techniques. However, XCT scanning can be relatively slow, which often prevents routine uptake for many applications. This paper explores the feasibility of improving the speed of XCT measurements whilst maintaining the quality of the dimensional measurements derived from reconstructed volumes. In particular, we compare two approaches to fast XCT acquisition, the use of fewer XCT projections as well as the use of shortened x-ray exposure times for each projection. The study shows that the additional Poisson noise produced by reducing the exposure for each projection has significantly less impact on dimensional measurements compared to the artefacts associated with strategies that take fewer projection images, leading to about half the measurement error variability. Advanced reconstruction algorithms such as the conjugate gradient least squares method or total variation constrained approaches, are shown to allow further improvements in measurement speed, though this can come at the cost of increased measurement bias (e.g. 2.8 % increase in relative error in one example) and variance (e.g. 25 % in the same example).

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Submitted date: 28 April 2022
Published date: 16 June 2022

Identifiers

Local EPrints ID: 457109
URI: http://eprints.soton.ac.uk/id/eprint/457109
ISSN: 0026-1394
PURE UUID: 163bac4b-02e3-4986-891b-6225983f283e
ORCID for Harry Rossides: ORCID iD orcid.org/0000-0002-7547-0256
ORCID for Richard Boardman: ORCID iD orcid.org/0000-0002-4008-0098
ORCID for Thomas Blumensath: ORCID iD orcid.org/0000-0002-7489-265X

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Date deposited: 24 May 2022 16:37
Last modified: 12 Jul 2022 01:42

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Contributors

Author: Harry Rossides ORCID iD
Author: Hossein Towsyfyan
Author: Ander Biguri
Author: Hans P Deyhle
Author: Reuben J Lindroos
Author: Mark Mavrogordato
Author: Wenjuan Sun

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