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application/pdfIEEEIEEE Sensors Journal; ;PP;99;10.1109/JSEN.2022.3160282Integrated sensing and acoustofluidic functions for flexible thin film acoustic wave devices based on metallic and polymer multilayersAcoustic wavethin filmflexiblebendablesensingacoustofluidicsmultilayersShahrzad ZahertarRan TaoHongzhe WangHamdi TorunPep Canyelles-PericasYang LiuJethro VernonWai Pang NgRichard BinnsQiang WuJingting LuoYong-Qing Fu
IEEE Sensors Journal19910.1109/JSEN.2022.3160282PP1
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