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Integrated sensing and actuation capabilities of flexible surface acoustic wave devices with metallic and polymer layers

Integrated sensing and actuation capabilities of flexible surface acoustic wave devices with metallic and polymer layers
Integrated sensing and actuation capabilities of flexible surface acoustic wave devices with metallic and polymer layers
Flexible and bendable devices have become the key elements in the development of next-generation point-of-care systems and wearable technologies. In this paper, we report flexible surface acoustic wave (SAW) devices that are composed of a multilayer substrate; SAW devices are basically made of interdigital transducers (IDTs) that are patterned on a piezoelectric layer. In our fabricated devices, thin film of zinc oxide (ZnO), as the piezoelectric layer, is deposited on substrates made of trilayer of thin metal films (Nickel/Copper/Nickel) on top of a polyethylene terephthalate (PET) layer. We have characterized the devices in radio frequencies, and we have measured the response of the device to the temperature and the Ultraviolet (UV) light. Also, we have tested the actuation capability of our fabricated devices. We have successfully demonstrated that our fabricated devices can be employed as an integrated platform for sensing and actuation purposes using a single structure.
Microfluidic Actuation, Surface Acoustic Waves
IEEE
Zahertar, Shahrzad
9e9db9c7-0e1e-4d50-99b8-af23e09ab6ae
Tao, Ran
08d40ff6-99d4-4017-9f02-a789ec813496
Torun, Hamdi
6635ce04-57c2-4847-9cce-67ce2425d32b
Canyelles-Pericas, Pep
d6faf0b3-6416-4479-b0ae-6520e48ee4da
Fu, Yong Qing
33ef6026-25d5-472b-8ab5-861afb123abd
Zahertar, Shahrzad
9e9db9c7-0e1e-4d50-99b8-af23e09ab6ae
Tao, Ran
08d40ff6-99d4-4017-9f02-a789ec813496
Torun, Hamdi
6635ce04-57c2-4847-9cce-67ce2425d32b
Canyelles-Pericas, Pep
d6faf0b3-6416-4479-b0ae-6520e48ee4da
Fu, Yong Qing
33ef6026-25d5-472b-8ab5-861afb123abd

Zahertar, Shahrzad, Tao, Ran, Torun, Hamdi, Canyelles-Pericas, Pep and Fu, Yong Qing (2021) Integrated sensing and actuation capabilities of flexible surface acoustic wave devices with metallic and polymer layers. In FLEPS 2021 - IEEE International Conference on Flexible and Printable Sensors and Systems. IEEE. 4 pp . (doi:10.1109/FLEPS51544.2021.9469755).

Record type: Conference or Workshop Item (Paper)

Abstract

Flexible and bendable devices have become the key elements in the development of next-generation point-of-care systems and wearable technologies. In this paper, we report flexible surface acoustic wave (SAW) devices that are composed of a multilayer substrate; SAW devices are basically made of interdigital transducers (IDTs) that are patterned on a piezoelectric layer. In our fabricated devices, thin film of zinc oxide (ZnO), as the piezoelectric layer, is deposited on substrates made of trilayer of thin metal films (Nickel/Copper/Nickel) on top of a polyethylene terephthalate (PET) layer. We have characterized the devices in radio frequencies, and we have measured the response of the device to the temperature and the Ultraviolet (UV) light. Also, we have tested the actuation capability of our fabricated devices. We have successfully demonstrated that our fabricated devices can be employed as an integrated platform for sensing and actuation purposes using a single structure.

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e-pub ahead of print date: 20 June 2021
Additional Information: Funding Information: ACKNOWLEDGMENT The This work was supported by the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and UK Fluidic Network (EP/N032861/1) - Special Interest Group of Acoustofluidics. Publisher Copyright: © 2021 IEEE. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.
Venue - Dates: 2021 IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2021, , Virtual, Online, 2021-06-20 - 2021-06-23
Keywords: Microfluidic Actuation, Surface Acoustic Waves

Identifiers

Local EPrints ID: 457339
URI: http://eprints.soton.ac.uk/id/eprint/457339
PURE UUID: b085d84a-5bef-4482-a9e6-0bea6c090791
ORCID for Shahrzad Zahertar: ORCID iD orcid.org/0000-0001-6988-2345

Catalogue record

Date deposited: 01 Jun 2022 16:42
Last modified: 18 Mar 2024 04:03

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Contributors

Author: Ran Tao
Author: Hamdi Torun
Author: Pep Canyelles-Pericas
Author: Yong Qing Fu

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