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Growth and properties of silicon nitride films

Growth and properties of silicon nitride films
Growth and properties of silicon nitride films
University of Southampton
Ramanchandran, Ravunniarath
b3e954de-98da-4df5-86dc-865027bb39b9
Ramanchandran, Ravunniarath
b3e954de-98da-4df5-86dc-865027bb39b9

Ramanchandran, Ravunniarath (1967) Growth and properties of silicon nitride films. University of Southampton, Doctoral Thesis.

Record type: Thesis (Doctoral)
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Published date: 1967

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Local EPrints ID: 458733
URI: http://eprints.soton.ac.uk/id/eprint/458733
PURE UUID: 8036126e-d4b0-46aa-b79d-e56731dd894e

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Date deposited: 04 Jul 2022 16:54
Last modified: 16 Mar 2024 18:25

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Author: Ravunniarath Ramanchandran

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