Johnson, Saccha Ellen (1996) Atmospheric pressure chemical vapour deposition of titanium nitride from titanium tetrachloride and ammonia. University of Southampton, Doctoral Thesis.
Record type:
Thesis
(Doctoral)
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Published date: 1996
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Local EPrints ID: 459365
URI: http://eprints.soton.ac.uk/id/eprint/459365
PURE UUID: 86c4a2b6-ee93-498f-83c9-8797370e5f15
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Date deposited: 04 Jul 2022 17:09
Last modified: 04 Jul 2022 17:09
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Author:
Saccha Ellen Johnson
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